采用飞秒激光制备了无氢氧掺杂类金刚石膜,研究了环境气压对膜层红外性能的影响,并从掺杂含量、原子键、晶态结构等微观特性方面分析了膜层在含氧条件下的演变。研究发现:氧气氛环境可以提高无氢类金刚石膜中金刚石相的含量,有效降低类金刚石膜的红外吸收,从而增强其红外透射性能;膜层折射率可以由气氛环境自由调控,为多层光学膜的设计提供了匹配手段;氧气氛环境未改变类金刚石膜的非晶结构,不会妨害其红外性能。提出了碳膜在含氧条件下的原子键重组模型,丰富了氧掺杂类金刚石膜的研究,为提升类金刚石膜对红外窗口的增透保护提供了理论分析和实践依据。

In this study, non-hydrogenated oxygen-doped diamond-like carbon (DLC) films were grown by femtosecond laser, and the influence of oxygen atmosphere on the infrared (IR) properties of the films was investigated. The evolution of the properties of oxygen-doped DLC films at the microscale was determined by investigating their doping content, atomic bonding, and crystal structure. The results show that the oxygen atmosphere increases the diamond-phase content and reduces the absorption of the DLC films, thus increasing their IR transmittance. The refractive index of the films can be freely controlled by the oxygen atmosphere, which provide a suitable method for the design of multilayer optical films. The oxygen in the environment does not change the amorphous structure of the DLC films and does not hinder their IR transmittance. A model is proposed for the rearrangement of the atomic bonds in the carbon films in the oxygen atmosphere, which is of benefit to the research on oxygen-doped DLC films and provides theoretical analysis and a practical basis for improving the anti-reflective protection of IR windows by DLC films.