光学成像系统光学波前的高精度测试
邵晶, 马冬梅, 聂真威. 光学成像系统光学波前的高精度测试[J]. 光学 精密工程, 2011, 19(11): 2582.
SHAO Jing, MA Dong-mei, NIE Zhen-wei. Accurate test of optical wave front for optical imaging system[J]. Optics and Precision Engineering, 2011, 19(11): 2582.
[1] FLAGELLO D, DER LAAN H V. et al.. Understanding systematic and random CD variations using predictive modelling techniques[J]. SPIE, 1999, 3679:162-175.
[2] SMITH B W, SCHLIEF R. Understanding lens aberration and influences to lithographic imaging[J]. Optical Microlithography XIII, 2000 :294-306.
[3] NIJBOER B R A. The diffraction theory of aberrations[D].Groningen: University of Groningen, 1942.
[4] JANSSEN A J E M. Extended Nijboer Zernike approach for the computation of optical point-spread functions[J]. J. Opt. Soc. Am. A, 2002 ,19 :849-856.
[5] BRAAT J, DIRKSEN P, JANSSEN A J E M. Assessment of an extended Nijboer Zernike approach for the computation of optical point-spread functions[J]. J. Opt. Soc. Am. A,2002 ,19 : 858-870.
[6] DIRKSEN P, BRAAT J, JANSSEN A J E M. Aberration retrieval using the extended Nijboer-Zernike approach[J]. SPIE ,2003, 4691:61-68.
[7] GERCHBERG R W, SAXTON W O. A practical algorithm for the determination of phase from image and diffraction plane pictures[J]. Optic, 1971, 34:275-283.
[8] FIENUP J R. Reconstruction of an object from the modulus of its Fourier transform[J]. Optic Letters,1978,3(1):27-29.
[9] FIENUP J R, MARRON J C, SCHULZ T J, et al..Hubble space telescope characterized by using phase-retrieval algorithms[J]. Applied optics,1993, 32:1747-1767.
[10] DEAN B H, ARONSTEIN D L, SMITH J S, et al.. Phase retrieval algorithm for WST flight and tested telescope[J]. SPIE, 2006, 6265:1-17.
[11] BRADY G R, FIENUP J R. Nonlinear optimization algorithm for retrieving the full complex pupil function[J]. Optics Express, 2006, 14:474-486.
[12] 马冬梅, 陈土泉,刘志祥,等.位相复原技术在光学成像质量测评中的应用[J].光学 精密工程, 2009, 17(12):2912-2918.
MA D M, CHEN T Q, LIU ZH X, et al.. Application of phase retrieval technology in evaluation of optical imaging system[J]. Opt.Precision Eng., 2009, 17(12):2912-2918.(in Chinese)
[13] 吴元吴,王斌,赵金宇等.利用相位差异技术恢复宽带白光图像[J], 光学 精密工程, 2010, 18(8):1849-1854.
[14] 马冬梅, 陈土泉.点衍射波前位相的测评[J]. 光学精密工程, 2010, 18(11): 2390-2397.
[15] 黄利新,姚新,蔡冬梅,等.一种快速高精度的相位恢复迭代算法[J],中国激光,2010,37(5): 1218-1221
[16] 胡家升.光学工程导论[M].第二版.大连:大连理工大学出版社,2005:579-583.
HU J SH. Introduction to Optical Engineering[M]. Second Edition. Dalian:Dalian University of Technology Press, 2005: 579-583.(in Chinese)
[17] DER AVOORT C V, BRAAT J J M, DIRKSEN P. et al.. Aberration retrieval from the intensity point-spread function in the focal region using the extended Nijboer Zernike approach[J]. Modern Optics, 2005 , 52(12):1695-1728.
[18] ABRAMOWITZ M, STEGUN I A. Handbook of Mathematical Functions[M]. New York:Dover, 1970: 480-481.
[19] 刘志祥. 大口径光学系统波前分析技术研究[D]. 北京:中国科学院研究生院,2008: 19-36.
LIU ZH X. Study on the wavefront analysis of large aperture optical system[D]. Beijing:Chinese Academy of Sciences,2008: 19-36.(in Chinese)
邵晶, 马冬梅, 聂真威. 光学成像系统光学波前的高精度测试[J]. 光学 精密工程, 2011, 19(11): 2582. SHAO Jing, MA Dong-mei, NIE Zhen-wei. Accurate test of optical wave front for optical imaging system[J]. Optics and Precision Engineering, 2011, 19(11): 2582.