[1] Huang Yifan,Chattopadhyay S,Jen Yijun ,et al.Improved broadband and quasi-omnidirectional antireflection properties with biomimetic silicon nanostructions［J］.Nature Nanotechnology,2007,2(12):770—774.

[2] Chihhuang S,Jiang Peng,Jiang Bin.Broadband moth-eye antireflection coatings on silicon［J］.Applied Physics Letters,2008,92(6):06112.

[3] Huang Wehan,Chihhung S,Min Weilun,et al. Templated fabrication of periodic binary nanostructures［J］.Journal of Physical Chemistry,2008,112(45):17586—17591.

[4] Ren Wanchun,Liu Bo,et al. Nano-scale gap filling and mechanism of deposit-etch-deposit process for phase-change material ［J］. Chinese Physics B,2012,21(11): 115203-1-5.

[5] 宋秋明. SiOx 渐变折射率薄膜与 ZnO透明导电薄膜的反应磁控溅射工艺及机理研究［D］. 南京：中国科学技术大学,2008.Song Qiuming. Reaction magnetron sputtering process and mechanism research of SiOx inhomogeneous coatings and ZnO ITO films［D］.Nanjing:University of Science and Technology of China,2008 .

[6] Zhang Xintong,Akira F,Jin Ming,ta al. Double-layered TiO2-SiO2 nanostructured films with self-cleaning and antireflective properties ［J］. Physics Chemistry B,2006,110(50): 25142—25148.

[7] 殷桂琴. 旋转涂敷法(SOD)制备硅基多孔低k薄膜材料的研究［D］. 苏州：苏州大学,2008.Yin Guiqin. Silicon Quito porous low k thin film materials of SOD［D］.Suzhou: Suzhou University,2008.

[8] Yao T F,Wu Pinghan ,Wu T M,et al. Fabrication of anti-reflective structures using hot embossing witha stainless steel template irradiated by femtosecond laser［J］. Microelectronic Engineering,2011,88(9): 2908—2912.

[9] 董莹,杭凌侠,等. 渐变折射率薄膜折射率轮廓的分层检测法［J］. 西安工业大学学报,2013,33(4): 283—287. Dong Yin,Hang Linxia ,et al.Layered detection method of inhomogeneous AR coatings［J］. Journal of Xi'an Technological University,2013,33(4):283—287.

[10] 沈自才,沈建,等. 渐变折射率薄膜的分层评价探讨［J］. 物理学报,2007,56(3): 1325—1328.Shen Zicai,Shen Jian,et al.Layered discussion and evaluation of inhomogeneous AR coatings［J］.Acta Physica Sinica,2007,56(3):1325—1328.

[11] Rayleigh L.On reflection of vibrations at theconfines of two media between which the transition is gradual［J］.Proceedings of the London　Mathematial Society,1880,11(1):51—56.

[12] Beernhard C G,Miller W H. A corneal nipple pattern in insect compound eyes［J］.Acta Physiologica Scandinavica,1962,56(3-4):385—38.

[13] 李腾,丁剑,范同祥.仿生纳米减反结构的制备［J］.材料导报.2012,26(8):71—77.Li Teng,Ding Jian,Fan Tongxiang.Fabrication of bionic anti-reflective nanostructures［J］.Materials Review,2012,26(8):71—77.

[14] 康立升. 渐变折射率纳米多孔减反膜的建模制备和表征［D］. 广州：暨南大学,2014.Kang Lisheng.Growth and characterization of inhomogeneous nano AR coating［D］. Guangzhou: Jinan University,2014.