红外与激光工程, 2018, 47 (12): 1243003, 网络出版: 2019-01-10
表面杂质和节瘤缺陷诱导薄膜元件热熔融损伤
Thermal melting damage of thin film components induced by surface impurities and nodule defects
激光 表面杂质 节瘤缺陷 薄膜元件 热熔融 laser surface impurities nodule defects thin film components thermal melting damage
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余霞, 徐娇, 张彬. 表面杂质和节瘤缺陷诱导薄膜元件热熔融损伤[J]. 红外与激光工程, 2018, 47(12): 1243003. Yu Xia, Xu Jiao, Zhang Bin. Thermal melting damage of thin film components induced by surface impurities and nodule defects[J]. Infrared and Laser Engineering, 2018, 47(12): 1243003.