矩形孔径主动自由曲面变形数据拟合
周超, 邢廷文. 矩形孔径主动自由曲面变形数据拟合[J]. 光电工程, 2016, 43(12): 104.
ZHOU Chao, XING Tingwen. Deformation Data Fitting of Active Free-form Surface with Rectangular Aperture[J]. Opto-Electronic Engineering, 2016, 43(12): 104.
[1] Matsuyama Tomoyuki，Ohmura Yasuhiro，Williamson David M. The Lithographic Lens：its history and evolution [J]. Proceedings of SPIE(S0277-786X)，2006，6154(615403)：1-14.
[2] WANG Yueqiang，LIU Yong. Research development of thermal aberration in 193 nm lithography exposure system [J]. Proceedings of SPIE(S0277-786X)，2014，9283(928314)：1-8.
[3] 朱红伟，邢廷文. 一种高数值孔径浸没投影物镜：中国，201310325062.5 [P]. 2013.
[4] Mahajan Virendra N. Zernike annular polynomials for imaging systems with annular pupils [J]. Journal of the Optical Society of America(S0030-3941)，1981，71(1)：75-85.
[5] Mahajan Virendra N，DAI Guangming. Orthonormal polynomials for hexagonal pupils [J]. Optics Letters(S0146-9592)，2006， 31(16)：2462-2464.
[6] HE Pinjiang，ZONG Xiaoying，FU Ruimin. Zernike polymomials for rectangular area and applications in off-axis asphere testing [J]. Proceedings of SPIE(S0277-786X)，2010，7656(765615)：1-6.
[7] 廖志远，邢廷文，刘志祥. 矩形孔径上折射率均匀性数据拟合研究 [J]. 光电工程，2011，38(11)：146-150.
[8] Ali Hadi Al-Hamdani，Sundus Y Hasan. Zernike polynomials for optical systems with rectangular and square apertures of area equal to Pi [J]. Indian Journal of Pure & Applied Physics(S0019-5588)，2013，51(1)：837-843.
[9] Mahajan Virendra N，DAI Guangming. Orthonormal polynomials in wavefront analysis：analytical solution [J]. Journal of the Optical Society of America A(S1084-7529)，2007，24(9)：2994-3016.
[10] Staals Frank，Andryzhyieuskaya Alena，Bakker Hans，et al. Advanced wavefront Engineering for Improved Imaging and Overlay Applications on a 1.35 NA Immersion Scanner [J]. Proceedings of SPIE(S0277-786X)，2011，7973(79731G)：1-13.
[11] YE Jingfei，LI Xinhua，GAO Zhishan，et al. Modal wavefront reconstruction over general shaped aperture by numerical orthogonal polynomials [J]. Optical Engineering(S0091-3286)，2015，54(3)：419–427.
周超, 邢廷文. 矩形孔径主动自由曲面变形数据拟合[J]. 光电工程, 2016, 43(12): 104. ZHOU Chao, XING Tingwen. Deformation Data Fitting of Active Free-form Surface with Rectangular Aperture[J]. Opto-Electronic Engineering, 2016, 43(12): 104.
PDF全文
