中国激光, 2019, 46 (9): 0904002, 网络出版: 2019-09-10   

基于光谱估计与多光谱技术的光学元件表面疵病检测 下载: 970次

Measurement of Surface Defects of Optical Elements Based on Spectral Estimation and Multispectral Technique
作者单位
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学材料与光电研究中心, 北京 100049
3 中国工程物理研究院激光聚变研究中心, 四川 绵阳 621000
引用该论文

杨言若, 步扬, 徐静浩, 王少卿, 王向朝, 李杰. 基于光谱估计与多光谱技术的光学元件表面疵病检测[J]. 中国激光, 2019, 46(9): 0904002.

Yang Yanruo, Bu Yang, Xu Jinghao, Wang Shaoqing, Wang Xiangzhao, Li Jie. Measurement of Surface Defects of Optical Elements Based on Spectral Estimation and Multispectral Technique[J]. Chinese Journal of Lasers, 2019, 46(9): 0904002.

参考文献

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    General Administration of Quality Supervision, InspectionandQuarantine of the People's Republic of China. Surface imperfections of optical elements: GB/T 1185-2006[S]. Beijing: Standards Press of China, 2006.

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杨言若, 步扬, 徐静浩, 王少卿, 王向朝, 李杰. 基于光谱估计与多光谱技术的光学元件表面疵病检测[J]. 中国激光, 2019, 46(9): 0904002. Yang Yanruo, Bu Yang, Xu Jinghao, Wang Shaoqing, Wang Xiangzhao, Li Jie. Measurement of Surface Defects of Optical Elements Based on Spectral Estimation and Multispectral Technique[J]. Chinese Journal of Lasers, 2019, 46(9): 0904002.

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