不同质量块布局双端固支梁的等效弹簧系数的热效应
伍康, 叶雄英, 刘力涛, 杜敏, 周兆英. 不同质量块布局双端固支梁的等效弹簧系数的热效应[J]. 光学 精密工程, 2009, 17(6): 1409.
WU Kang, YE Xiong-ying, LIU Li-tao, DU Min, ZHOU Zhao-ying. Thermal effect on equivalent spring constants of double-clamped beams with different mass arrangements[J]. Optics and Precision Engineering, 2009, 17(6): 1409.
[1] KOVACS A, VIZVARY Z. Structure parameter sensitivity analysis of cantilever-and bridge-type accelerometers[J]. Sensors and Actuators A,2001,89:197-205.
[2] GARCIA E, LOBONTIU N, NAM Y. Mechanics of mems; A review of modeling, analysis and design[J]. SPIE,2004,5390:400-409.
[3] KAL S, DAS S, MAURYA D K, et al. CMOS compatible bulk micromachined silicon piezoresistive accelerometer with low off-axis sensitivity[J]. Microelectronics Journal,2006,37:22-30.
[4] MU C, LIN L W. Self-buckling of micromachined beams under resisitive hea ting[J].Journal of Microelectromechanical Systems,2000(9):146-151.
[5] BAO M H.Analysis and Design Principles of MEMS Deuices[M].Elsevier,2005:80.
伍康, 叶雄英, 刘力涛, 杜敏, 周兆英. 不同质量块布局双端固支梁的等效弹簧系数的热效应[J]. 光学 精密工程, 2009, 17(6): 1409. WU Kang, YE Xiong-ying, LIU Li-tao, DU Min, ZHOU Zhao-ying. Thermal effect on equivalent spring constants of double-clamped beams with different mass arrangements[J]. Optics and Precision Engineering, 2009, 17(6): 1409.
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