光学 精密工程, 2023, 31 (11): 1652, 网络出版: 2023-07-04  

压力传感器波纹膜片低应力激光焊接工艺 下载: 695次

Low stress laser welding technology for corrugated diaphragm of pressure sensor
作者单位
1 机械工业仪器仪表综合技术经济研究所,北京00055
2 南昌航空大学,江西南昌330063
摘要
设计了利用激光焊接技术进行波纹膜片焊接的工艺方案,提出了基于正交试验的关键焊接工艺参数优化方法,设计关键焊接工艺正交试验表,完成以焊缝残余应力为评价指标的正交试验。基于正交试验获得的较优焊接工艺参数组合,焊接压力传感器,完成了焊接密封性、拉伸强度和传感器静态性能指标的测试验证。结果表明,较优的压力传感器波纹膜片激光焊接工艺参数组合是激光功率350 W、脉冲频率150 Hz、脉冲宽度1.5 ms、转台转速4 200 (°)/min;压力传感器焊缝的拉伸强度高达499.60 MPa,具备较好的密封性;焊接波纹膜片后的传感器零点输出提高了17%左右,灵敏度、满量程输出、非线性、迟滞和重复性等指标变化不大,但是非线性、迟滞和重复性比同厂家的同类型传感器改善约1倍左右。正交试验确定的激光焊接工艺能够保障压力传感器的高质量封装应用。
Abstract
To develop a low-stress laser welding process for the corrugated diaphragm of a pressure sensor, a process scheme for the welding of the corrugated diaphragm using laser welding technology is designed, an optimization method for the key welding process parameters based on an orthogonal test is proposed, the orthogonal test table of the welding process is designed, and an orthogonal test with the residual stress of welding as the evaluation index is completed. Based on the best combination of welding process parameters obtained via the orthogonal test, the pressure sensors are welded, and the testing and verification of welding sealing, tensile strength, and static performance indicators of the sensors are completed. The experimental results indicate that a laser power of 350 W, pulse frequency of 150 Hz, pulse width of 1.5 ms, and turntable speed of 4 200 (°)/min are the optimal combination parameters of the laser welding process for the corrugated diaphragm of the pressure sensor; a rough calculation value of 499.60 MPa is obtained for the weld tensile strength of the pressure sensor, and the weld has a good sealing property. After welding the corrugated diaphragm, the zero output of the sensor is increased by approximately 17%, and indices such as sensitivity, full-scale output, nonlinearity, hysteresis, and repeatability exhibit little change. However, the nonlinearity, hysteresis, and repeatability are approximately two times better than those of the same type of sensor from the same manufacturer. The optimal laser welding process determined via the orthogonal test can ensure the high-quality packaging application of pressure sensors.

杜晓辉, 陈凡红, 刘帅, 朱敏杰, 许佳豪. 压力传感器波纹膜片低应力激光焊接工艺[J]. 光学 精密工程, 2023, 31(11): 1652. Xiaohui DU, Fanhong CHEN, Shuai LIU, Minjie ZHU, Jiahao XU. Low stress laser welding technology for corrugated diaphragm of pressure sensor[J]. Optics and Precision Engineering, 2023, 31(11): 1652.

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