半导体光电, 2017, 38 (5): 677, 网络出版: 2017-11-24  

薄膜型光纤F-P腔传感器弧形腔效应的补偿

Compensation of Diaphragm-Based F-P Fiber Sensor Due to the Arc-End Effect
作者单位
清华大学 电子工程系,北京 100084
引用该论文

杜旭, 霍力, 喻乐, 张敏. 薄膜型光纤F-P腔传感器弧形腔效应的补偿[J]. 半导体光电, 2017, 38(5): 677.

DU Xu, HUO Li, YU Le, ZHANG Min. Compensation of Diaphragm-Based F-P Fiber Sensor Due to the Arc-End Effect[J]. Semiconductor Optoelectronics, 2017, 38(5): 677.

参考文献

[1] Ran Z L, Liu S, Liu Q, et al. Novel high-temperature fiber-optic pressure sensor based on etched PCF F-P interferometer micromachined by a 157nm laser[J]. IEEE Sensors J., 2015, 15(7): 3955-3958.

[2] Li Y T, Zhang W T, Li F. A miniature Fabry-Perot pressure sensor for intracranial pressure measurement[C]//IEEE Inter. Conf. on Nano/Micro Eng. and Molecular Systems, 2014: 444-447.

[3] Wang W J, Lin R M, Sun T T, et al. Performance-enhanced Fabry-Perot microcavity structure with a novel non-planar diaphragm[J]. Microelectron. Eng., 2003, 70(1): 102-108.

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[5] Arya V, Vries M D, Murphy K A., et al. Exact analysis of the extrinsic Fabry-Perot interferometric optical fiber sensor using Kirchhoff’s diffraction formalism[J]. Opt. Fiber Technol., 1995, 1(4): 380-384.

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杜旭, 霍力, 喻乐, 张敏. 薄膜型光纤F-P腔传感器弧形腔效应的补偿[J]. 半导体光电, 2017, 38(5): 677. DU Xu, HUO Li, YU Le, ZHANG Min. Compensation of Diaphragm-Based F-P Fiber Sensor Due to the Arc-End Effect[J]. Semiconductor Optoelectronics, 2017, 38(5): 677.

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