激光与光电子学进展, 2023, 60 (19): 1923001, 网络出版: 2023-09-28
集成马赫-曾德尔干涉大量程高灵敏度压力传感器
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Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference
马赫-曾德尔干涉 压力传感器 大范围 高灵敏度 集成光学 Mach-Zehnder interference pressure sensor large range high sensitivity integrated optics
摘要
提出了一种基于非对称马赫-曾德尔干涉(AMZI)和3D打印立体光刻树脂模块的大量程压力传感器,分析了传感器的特性,推导的公式表明传感器的灵敏度与单臂长度成正比,与衍射阶数成反比。在设计中,高灵敏度通过小的衍射级实现,AMZI压力传感器采用平面光波技术制造,压力块采用树脂(DM11)3D打印,测试灵敏度为0.3047 nm/MPa。
Abstract
We present a large range pressure sensor based on asymmetric Mach-Zehnder interference (AMZI) and a three-dimensional (3D) printed stereolithography resin module. The filtering characteristic is analyzed, and formulas show that the sensor's sensitivity is proportional to the length of one arm and inversely proportional to the diffraction order. In our design, high sensitivity is realized by a small diffraction order. The AMZI pressure sensor is fabricated using planar lightwave technology, and the pressure block is 3D printed with resin (DM11). The measured sensitivity is 0.3047 nm/MPa.
张楠, 尹锐. 集成马赫-曾德尔干涉大量程高灵敏度压力传感器[J]. 激光与光电子学进展, 2023, 60(19): 1923001. Nan Zhang, Rui Yin. Large Range and High-Sensitivity Pressure Sensor Based on Integrated Mach-Zehnder Interference[J]. Laser & Optoelectronics Progress, 2023, 60(19): 1923001.