[1] Burnham A K,Hackel A L,Wegner P J,et al. Improving 351-nm damage performance of large-aperture fused silica and DKDP optics[R].UCRL-JC-144298,2002.

[2] Baker L R. On-machine measurement of roughness,waviness and flaws[C]//Proc of SPIE. 1992,1333:248-256.

[3] 戴名奎,徐德衍. 光学元件的疵病检验与研究现状[J].光学仪器,1996,18(4):32-39.(Dai Mingkui,Xu Deyan. The present situation of imperfections testing and researching on the optical components.Optical Instruments,1996,18(4):32-39)

[4] Huard A. Visibility method to classify microscopic surface defects for both reflection and transmission systems[C]//Proc of SPIE. 1985,525:36-42.

[5] Baker L R. Inspection of surface flaws by comparator microscopy[J].Appl Opt,1988,27(22):4620-4625.

[6] 张晓,杨国光,程上彝,等.光学表面疵病的激光频谱分析法及其自动检测仪[J].仪器仪表学报,1994,15(4):396-399.(Zhang Xiao,Yang Guoguang,Cheng Shangyi,et al. Laser frequency spectrum analysis method and automatic inspection instrument of optical surface inperfection.Chinese Journal of Scientific Instrument,1994,15(4):396-399)

[7] 沈卫星.相干滤波成像系统测量光学元件表面疵病[J].光学技术,2000,26(4):361-365.(Shen Weixing. Surface defects of the optical elements measured by the coherent filter imaging system.Optical Technique,2000,26(4):361-365)

[8] Lauterborn W, Kurz T,Wiesenfeldt M. Coherent optics fundamentals and applications[M].Berlin:Springer-Verlag,1993:166-168.

[9] 汪凤全,杨甬英,孙丹丹. 精密表面缺陷的数字化检测系统研究[J].光学仪器,2006,28(3):71-75.( Wang Fengquan,Yang Yongying,Sun Dandan. Research of digital in spection system of precise surface defect.Optical Instruments,2006,28(3):71-75)

[10] 王雪,谢志江,孙红岩,等. 大口径精密光学元件表面疵病检测系统研究[J].仪器仪表学报,2006,27(10):1262-1265.( Wang Xue,Xie Zhijiang,Sun Hongyan,et al. Study on automatic flaw inspection system for large caliber precision optical surface.Chinese Journal of Scientific Instrument,2006,27(10):1262-1265)

[11] GB 1185-89. 光学零件表面疵病[S].1989.(GB 1185-89.Surface defects of optical components,1989)