红外与激光工程, 2020, 49 (2): 0213002, 网络出版: 2020-03-10   

基于混合优化算法的纳米薄膜参数表征

Characterization of nanofilm parameters based on hybrid optimization algorithm
作者单位
1 上海市计量测试技术研究院, 上海 201203
2 中国计量大学 计量测试工程学院, 浙江 杭州 310018
3 中国航空工业集团公司 北京长城计量测试技术研究所 计量与校准技术重点实验室, 北京 100095
引用该论文

雷李华, 张馨尹, 吴俊杰, 李智玮, 李强, 刘娜, 谢张宁, 管钰晴, 傅云霞. 基于混合优化算法的纳米薄膜参数表征[J]. 红外与激光工程, 2020, 49(2): 0213002.

Lei Lihua, Zhang Xinyin, Wu Junjie, Li Zhiwei, Li Qiang, Liu Na, Xie Zhangning, Guan Yuqing, Fu Yunxia. Characterization of nanofilm parameters based on hybrid optimization algorithm[J]. Infrared and Laser Engineering, 2020, 49(2): 0213002.

参考文献

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[8] Tong G, Tao H, Shu A, et al. Ellipsometric study on optical properties of hydrogen plasma-treated aluminum-doped ZnO thin film[J]. Vacuum, 2019, 163(2): 37-42.

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雷李华, 张馨尹, 吴俊杰, 李智玮, 李强, 刘娜, 谢张宁, 管钰晴, 傅云霞. 基于混合优化算法的纳米薄膜参数表征[J]. 红外与激光工程, 2020, 49(2): 0213002. Lei Lihua, Zhang Xinyin, Wu Junjie, Li Zhiwei, Li Qiang, Liu Na, Xie Zhangning, Guan Yuqing, Fu Yunxia. Characterization of nanofilm parameters based on hybrid optimization algorithm[J]. Infrared and Laser Engineering, 2020, 49(2): 0213002.

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