红外与激光工程, 2015, 44 (S): 0183, 网络出版: 2016-01-26  

离子束辅助沉积大口径光学薄膜

Large optical coatings fabricated by ion assisted technology
作者单位
中国科学院光电技术研究所,四川 成都 610209
引用该论文

艾万君, 熊胜明. 离子束辅助沉积大口径光学薄膜[J]. 红外与激光工程, 2015, 44(S): 0183.

Ai Wanjun, Xiong Shengming. Large optical coatings fabricated by ion assisted technology[J]. Infrared and Laser Engineering, 2015, 44(S): 0183.

参考文献

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[4] Woo Seouk-Hoon, Chang Kwon Hwangbo. Effects of annealing on the optical, structural, and chemical properties of TiO2 and MgF2 thin films prepared by plasma ion-assisted deposition [J]. Applied Optics, 2006, 45(7): 1447-1455.

[5] 艾万君, 熊胜明. End-Hall与APS离子源辅助沉积制备的薄膜特性[J]. 中国激光, 2011, 38(11): 1107001.

    Ai Wanjun, Xiong Shengming. Properties of thin films prepared with End-Hall and APS ion assisted deposition[J]. Chinese Journal of Lasers, 2011, 38(11): 1107001. (in Chinese)

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艾万君, 熊胜明. 离子束辅助沉积大口径光学薄膜[J]. 红外与激光工程, 2015, 44(S): 0183. Ai Wanjun, Xiong Shengming. Large optical coatings fabricated by ion assisted technology[J]. Infrared and Laser Engineering, 2015, 44(S): 0183.

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