静电驱动MOEMS保险机构的设计与试验
刘加凯. 静电驱动MOEMS保险机构的设计与试验[J]. 光学 精密工程, 2019, 27(2): 334.
LIU Jia-kai. Design and test of electrostatic driving MOEMS arming device[J]. Optics and Precision Engineering, 2019, 27(2): 334.
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刘加凯. 静电驱动MOEMS保险机构的设计与试验[J]. 光学 精密工程, 2019, 27(2): 334. LIU Jia-kai. Design and test of electrostatic driving MOEMS arming device[J]. Optics and Precision Engineering, 2019, 27(2): 334.