Si衬底上插入SiO2膜对Ag纳米颗粒陷光性能的影响

白一鸣; 延玲玲; 王艳宁; 苏琳; 刘海; 陈诺夫; 姚建曦

doi:doi:10.3788/gzxb20164505.0516001

光子学报, 2016, 45 (5): 0516001, 网络出版: 2016-06-06

Si衬底上插入SiO2膜对Ag纳米颗粒陷光性能的影响

Influence of the Silica Films Inserted into Silicon Substrate on the Light Trapping Performance of Silver Nanoparticles

论文大纲

白一鸣 ^*延玲玲王艳宁苏琳刘海陈诺夫姚建曦

作者单位

华北电力大学新能源电力系统国家重点实验室, 北京 102206

二氧化硅膜银纳米颗粒形成机理消光谱陷光性能 Silica film Ag nanoparticles Formation mechanism Extinction spectra Light trapping performance

摘要

采用磁控溅射法在Si衬底上制备了SiO2介质膜, 系统地研究了SiO2膜引入对Ag纳米颗粒的表面覆盖率、形貌、形成机理和光学性质的影响.研究发现引入SiO2介质膜后, Ag纳米颗粒的表面覆盖率显著增加, 平均粒径明显降低.基于现有的Ag纳米颗粒形成机理, 提出了粗糙表面Ag膜断裂模型以解释其形貌发生变化的原因.紫外-可见光分光光度计测试表明, 引入SiO2膜并优化其厚度, 可使Ag纳米颗粒的偶极消光峰最大红移86nm, 但消光峰强度明显下降.数值模拟计算表明, 引入SiO2膜的Ag纳米颗粒所能散射的光子数量最小减少2×1018个.因此, 在Si衬底上沉积SiO2膜, 不利于Ag纳米颗粒陷光性能的提高.

Abstract

Introducing silica dielectric film deposited by magnetron sputtering on silicon substrates, the dependence of the surface coverage ratio, morphology, formation mechanism and optical properties for silver nanoparticles on silica dielectric film was exploited. The results indicate that the surface coverage ratios of silver nanoparticles increase but the mean diameters for silver nanoparticles decrease obviously after introducing silica dielectric film. The reason of morphological evolution for silver nanoparticles was explained by an improved model for silver film rupture based on the formation mechanism of silver nanoparticles. A red shift of up to 86 nm of the dipole extinction peak of silver nanoparticles is realized by adjusting the thickness of the silica film but the peak intensity decrease greatly, as analyzed by an ultraviolet-visible spectrophotometer. Numerical simulations of the optimized structures demonstrate that the number of scattered photons by the silver nanoparticles is decreased by as much as 2×1018 after inserting a silica layer. Therefore, it is undesirable to deposit silica layer on silicon substrate before silver nanoparticle formation for the light trapping performance of silver nanoparticles.

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白一鸣, 延玲玲, 王艳宁, 苏琳, 刘海, 陈诺夫, 姚建曦. Si衬底上插入SiO2膜对Ag纳米颗粒陷光性能的影响[J]. 光子学报, 2016, 45(5): 0516001. BAI Yi-ming, YAN Ling-ling, WANG Yan-ning, SU Lin, LIU Hai, CHEN Nuo-fu, YAO Jian-xi. Influence of the Silica Films Inserted into Silicon Substrate on the Light Trapping Performance of Silver Nanoparticles[J]. ACTA PHOTONICA SINICA, 2016, 45(5): 0516001.

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