激光干涉光刻制备976 nm分布反馈式激光器光栅 
下载： 754次
白云峰, 范杰, 邹永刚, 王海珠, 海一娜, 田锟. 激光干涉光刻制备976 nm分布反馈式激光器光栅[J]. 激光与光电子学进展, 2017, 54(12): 120501.
Bai Yunfeng, Fan Jie, Zou Yonggang, Wang Haizhu, Hai Yina, Tian Kun. Fabrication of Gratings Used in 976 nm Distributed Feedback Lasers Based on Laser Interference Lithography[J]. Laser & Optoelectronics Progress, 2017, 54(12): 120501.
[1] Fessant T. Gaussian-like tapered grating quarter wave-shifted DFB semiconductor lasers for high-power single-mode operation［J］. Applied Physics B, 1998, 67(6): 769-772.
[2] Kamp M, Koeth J. High-power pulsed 976-nm DFB laser diodes［C］. SPIE, 2010, 7682: 76820T.
[3] DiLazaro T, Nehmetallah G. Optical frequency-domain reflectometry using multiple wavelength-swept elements of a DFB laser array［C］. SPIE, 2017, 10110: 101100I.
[4] Inoue D, Kai F, Nishiyama N, et al. Low-bias current 10 Gbit/s direct modulation of GaInAsP/InP membrane DFB laser on silicon［J］. Optics Express, 2016, 24(16): 18571-18579.
[5] Blauvelt H A, Kwong N S, Chen P C, et al. Optimum range for DFB laser chirp for fiber-optic AM video transmission［J］. Journal of Lightwave Technology,1993, 11(1): 55-59.
[6] 王琪, 郭锦锦, 陈伟, 等. 功率稳定且波长可调谐的窄线宽分布式反馈半导体激光器［J］. 中国激光, 2017, 44(1): 0101004.
[7] 左强, 于海涛, 杨玉枝. 一种同时提高功率效率和单纵模稳定性的不对称三段周期调制光栅DFB激光器［J］. 红外与激光工程, 2013, 42(s2): 451-455.
Zuo Qiang, Yu Haitao, Yang Yuzhi. Design of an asymmetric three corrugation-pitch-modulated DFB laser for improving output efficiency and stable single longitudinal mode operation［J］. Infrared & Laser Engineering, 2013, 42(s2): 451-455.
[8] 朱洪亮, 许晓冬, 王桓, 等. 取样光栅分布反馈激光器阵列器件研究［J］. 光电子·激光, 2010, 21(9): 1280-1282.
Zhu Hongliang, Xu Xiaodong, Wang Huan, et al. The study of distributed feedback laser arrays based on sampled gratings［J］. Journal of Optoelectronics·Laser, 2010, 21(9): 1280-1282.
[9] Zheng J, Xia D, Tang S, et al. DFBsemiconductor laser with discrete coupling coefficient based on the equivalent technique［J］. IEEE Photonics Journal, 2015, 7(3): 1502408.
[10] Fricke J, Decker J, Maassdorf A, et al. DFB lasers with apodized surface gratings for wavelength stabilization and high efficiency［J］. Semiconductor Science & Technology, 2017, 32(7): 075012.
[11] Chou S Y, Krauss P R, Renstrom P J. Nanoimprint lithography［J］. Journal of Vacuum Science & Technology B, 1996, 14(6): 4129-4133.
[12] Vieu C, Carcenac F, Pepin A, et al. Electron beam lithography: Resolution limits and applications［J］. Applied Surface Science, 2000, 164(1): 111-117.
[13] Henk W V, Abelmann L, Hennessy T C. Laser interference lithography［J］. Lithography Principles Processes & Materials, 2011, 23(3): 133-148.
[14] Makino T, Glinski J. Effects of radiation loss on the performance of second-order DFB semiconductor lasers［J］. IEEE Journal of Quantum Electronics, 1988, 24(1): 73-82.
[15] 杜宝勋. 半导体激光器原理［M］. 天津: 兵器工业出版社, 2004.
Du Baoxun. Principles of semiconductor lasers［M］. Tianjin: Weapon Industry Press, 2004.
[16] Shams-Zadeh-Amiri A M, Hong J, Li X, et al. Second- and higher-order resonant gratings with gain or loss-Part 1: Green′s function analysis［J］. IEEE Journal of Quantum Electronics, 2000, 36(12): 1421-1430.
[17] 何安国, 喻洪麟, 朱传新, 等. 光栅莫尔条纹细分及辨向方法研究［J］. 光电工程, 2007, 34(10): 45-49.
白云峰, 范杰, 邹永刚, 王海珠, 海一娜, 田锟. 激光干涉光刻制备976 nm分布反馈式激光器光栅[J]. 激光与光电子学进展, 2017, 54(12): 120501. Bai Yunfeng, Fan Jie, Zou Yonggang, Wang Haizhu, Hai Yina, Tian Kun. Fabrication of Gratings Used in 976 nm Distributed Feedback Lasers Based on Laser Interference Lithography[J]. Laser & Optoelectronics Progress, 2017, 54(12): 120501.
PDF全文
