1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室，上海 201800
2 中国科学院大学材料科学与光电工程中心，北京 100049
3 白俄罗斯共和国开放式股份公司“精密电子机械制造设计局-光学机械设备”，白俄罗斯明斯克 220033
针对微反射镜阵列（MMA）微反射镜集中度高、尺寸小，在实际检测过程中相邻镜面反射光容易出现串扰的问题，提出了一种用于微反射镜阵列角位置检测的光斑串扰抑制算法。对照射到阵列中待测微反射镜及邻域微反射镜上的光强进行标定，通过求解光强矩阵方程获得每个微反射镜的角位置信息。仿真结果显示，在检测光斑尺寸大于单个微反射镜尺寸的串扰情况下，该方法的检测精度可保持10 μrad以上，满足光刻机使用指标需求。所提出的检测方法可有效解决MMA检测过程中的串扰问题，对光刻机自由光瞳照明模块的角位置检测具有重要意义。
测量 自由光瞳照明 微反射镜阵列（MMA） 角位置检测 光斑串扰抑制算法 中国激光
2023, 50(23): 2304003
Author Affiliations
Abstract
1 Laboratory of Information Optics and Optoelectronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
This paper reports a detection method of two-dimensional (2D) enhancement and three-dimensional (3D) reconstruction for subtle traces with reflectance transformation imaging, which can effectively locate the trace area of interest and extract the normal data of this area directly. In millimeter- and micron-scale traces, during 3D construction, we presented a method of data screening, conversion, and amplification, which can successfully suppress noise, improve surface and edge quality, and enhance 3D effect and contrast. The method not only captures 2D and 3D morphologies of traces clearly but also obtains the sizes of these traces.
subtle traces 2D enhancement 3D reconstruction size Chinese Optics Letters
2021, 19(3): 031101
光子学报
2020, 49(10): 1022001
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
In our Letter, two kinds of handwriting traces, colored and colorless, are studied by means of reflectance transformation imaging. The illumination direction and rendering mode can be changed alternatively to obtain two-dimensional and three-dimensional details of the traces that are not recognized easily by naked eyes. Furthermore, an objective evaluation method without reference is applied to evaluate the reconstructed images, which provides a basis for setting the illumination direction and rendering mode. Therefore, the handwriting trace information including the written content, the writing features, and the stroke order features can be obtained objectively and accurately.
110.3010 Image reconstruction techniques 120.6650 Surface measurements, figure 330.1715 Color, rendering and metamerism Chinese Optics Letters
2019, 17(11): 111101
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学, 北京 100049
3 上海海潮新技术研究所, 上海 200070
潜在指印的检测是物证检测中关键的一步。针对多种渗透性纸张上遗留的潜在指印,基于潜在指印残留物中有机物成分在紫外光激发下会产生荧光的特性,采用266 nm紫外激光器作为激发光源,通过二维激光扫描系统对潜在指印区域进行快速扫描,采用窄带滤光片滤除干扰光,以指印条纹对比度作为依据优化实验参数,采用剔除奇异亮点和提高对比度的方法复原指印荧光图像。通过对复印纸、书写纸、学生作业纸、便利贴和报纸这5种渗透性纸张上的汗指印和油指印进行检测,获得了汗指印和油指印的清晰图像。该方法可实现渗透性纸张上潜在指印的无损检测,在刑事侦查、痕迹检测等多个领域具有重要应用。
光电子学 本征荧光 指印检测 渗透性纸张 潜在指印 紫外激光 二维激光扫描系统
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
We set up a pulsed beam steering system with a simple feedback control method. The system applies an integration circuit to process a 2 μs short pulsed beam with a repetition rate of 25 Hz, and employs an iteration method to correct the beam with a reasonable feedback gain factor. The beam steering system achieves a performance of 30 μm position accuracy and 30 μrad pointing accuracy, and it can not only compensate the drift of the laser source but also correct the external disturbance. The design can be directly applied as a lithography tool.
Chinese Optics Letters
2015, 13(Suppl): S21401
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室, 上海 201800
2 中国科学院大学, 北京 100049
为使金标免疫层析技术能对目标被检物进行高灵敏度快速定量检测，研制了一种基于CMOS图像传感器的金标条阅读仪。根据纳米金颗粒对绿光的强烈吸收特性,使用绿光LED为照明光源；依据空白金标试纸条图像的灰度分布调节LED光强和位置，使成像区域的照明均匀性达到最佳；依据自定义评价参数调节CMOS图像传感器的成像控制参数，使图像质量达到最佳；使用空白金标试纸条图像数据做背景校正，再通过特定算法计算出样品中目标被检物的浓度。使用该金标条阅读仪对滴加有心肌肌钙蛋白I(cTnI)标准样品的金标试纸条进行检测，在质量浓度为0.25～64 ng/mL范围内具有良好的4-PL响应特性,相关系数R2>0.99；使用该金标条阅读仪对上述浓度范围的金标试纸条各进行20次重复测量,其中，对高浓度金标试纸条（64 ng/mL）测量结果的变异系数为0.134%，对低浓度金标试纸条（0.25 ng/mL）测量结果的变异系数为2.790%；功能灵敏度优于0.25 ng/mL。该金标条阅读仪具有重复性好、灵敏、快速、低功耗、小型化等特点。
医用光学 光电检测 光学生物传感器 免疫层析检测 纳米金颗粒 图像传感器 心肌肌钙蛋白Ⅰ
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室， 上海 201800
2 中国科学院研究生院， 北京 100049
光束稳定技术是光刻机照明系统中一项重要的单元技术，其作用是将激光器出射的经长距离传输后的光束稳定在需要的指向和位置上，以保证照明系统具有稳定的光强分布。光束稳定系统主要由光束测量和光束转向两个功能模块组成，推导了两个模块之间的光束传递矩阵，并基于LabView搭建了光电闭环控制实验系统。对系统性能进行了测试，通过人为引入已知光束漂移量得到如下结果：系统的指向稳态误差低于±3 μrad，位置稳态误差低于±0.04 mm，系统调整时间小于80 ms。结果表明该系统可以精确地把光束稳定在需要的指向和位置。
光学设计 光刻技术 光束稳定 闭环控制 光束测量
1 中国科学院上海光学精密机械研究所信息光学与光电技术实验室， 上海 201800
2 中国科学院研究生院， 北京 100049
在高分辨光学光刻技术中，光瞳整形技术针对不同的掩模图形产生特定的光瞳光强分布模式，从而实现分辨力增强，获得更好的成像性能。概述了高分辨率投影光刻机照明系统中基于衍射光学元件(DOE)、微透镜阵列(MLA)和微反射镜阵列(MMA)的3种光瞳整形技术，并对这些技术的工作原理、设计制作方法和性能特点进行了归纳与总结。
光学制造 光刻 离轴照明 光瞳整形 衍射光学元件 微透镜阵列 微反射镜阵列 激光与光电子学进展
2011, 48(11): 111101
Author Affiliations
Abstract
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Graduate University of Chinese Academy of Sciences, Beijing 100049, China
A method of clarifying bioaerosol particles is proposed based on T-matrix. Size and shape characterizations are simultaneously acquired for individual bioaerosol particles by analyzing the spatial distribution of scattered light. The particle size can be determined according to the scattering intensity, while shape information can be obtained through asymmetry factor (AF). The azimuthal distribution of the scattered light for spherical particles is symmetrical, whereas it is asymmetrical for non-spherical ones, and the asymmetry becomes intense with increasing asphericity. The calculated results denote that the 5o–10o scattering angle is an effective range to classify the bioaerosol particles that we are concerned of. The method is very useful in real-time environmental monitoring of particle sizes and shapes.
光散射 生物气溶胶颗粒 T矩阵 尺寸和形状 非对称因子 290.5850 Scattering, particles 290.1090 Aerosol and cloud effects Chinese Optics Letters
2011, 9(9): 092901
