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 The recent development of soft x-ray interference lithography in SSRF

Jun Zhao Shumin Yang Chaofan Xue Liansheng Wang Zhaofeng Liang Lei Zhang Yong Wang Yanqing Wu Renzhong Tai

[摘要]

 PDF全文International Journal of Extreme Manufacturing | 2020, 2(01):012005

 Nonuniform self-imaging of achromatic Talbot lithography

Huijuan Xia Shumin Yang Liansheng Wang Jun Zhao Chaofan Xue Yanqing Wu Renzhong Tai

[摘要]

 PDF全文Chinese Optics Letters | 2019, 17(06):062201

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