Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors
Research on the one-mirror-inclined three-mirror-cavity (OMITMiC) photodetectors in the laboratory is reported. In the structure of photodetectors, it is the inclined-mirror that makes the filtering cavity and the absorption cavity decoupled, thus narrow spectral response linewidth, wavelength-tunable and high quantum efficiency can be achieved simultaneously. On the basis of the theoretical analysis and experimental verification on the principle with separated optical components, the vertical taper structure, the key part in the whole integrated device was realized, by dynamic etch mask technique. Moreover, the first integrated device of this type was fabricated. A spectral linewidth less than 6 nm and a quantum efficiency of 52.6% have been achieved experimentally.
基金项目：Supported by the National Natural Science Foundation of China (69976007) and National Outstanding Young Scientist Found of China (69625101).
ZHANG Ruikang(张瑞康)：Beijing University of Posts and Telecommunications, Beijing 100876, China
WANG Qi(王琦)：Beijing University of Posts and Telecommunications, Beijing 100876, China
HUANG Yongqing(黄永清)：Beijing University of Posts and Telecommunications, Beijing 100876, China
REN Xiaomin(任晓敏)：Beijing University of Posts and Telecommunications, Beijing 100876, China
备注：HUANG Hui was born in Fuzhou, Fujian, China, in 1974. He received the B.Sc.,M.Sc., degrees in electronic science and applied physics from Fuzhou University, Fujian, China, in 1995 and 1998, respectively. He is currently pursuing the Ph.D.degree in optoelectronic at Beijing University of Posts and Telecommunications (BUPT), Beijing, China.
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HUANG Hui(黄辉),ZHANG Ruikang(张瑞康),WANG Qi(王琦),HUANG Yongqing(黄永清),REN Xiaomin(任晓敏). Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors[J]. 中国激光(英文版), 2002, 11(6): 440-444
HUANG Hui(黄辉),ZHANG Ruikang(张瑞康),WANG Qi(王琦),HUANG Yongqing(黄永清),REN Xiaomin(任晓敏). Experimental Study on One-mirror-inclined Three-mirror-cavity Photodetectors[J]. Chinese Journal of Lasers, 2002, 11(6): 440-444