光电位置敏感器件(PSD)是一种可直接对其光敏面上的光斑位置进行检测的光电器件,可构成非接触高精度动态测量系统。光电位置敏感器件在使用中的关键问题是如何定量确定入射光强的大小和克服各种背景光干扰,以提高检测的精度和可靠性。根据光电位置敏感器件的原理和光点位置方程,找到有背景光作用于光电位置敏感器件上位置输出的关系及背景光导致的位置误差的实验数据,同时研究入射光强对光电位置敏感器件位置输出误差最小的定量关系。

The pinciple of position sensitive detector (PSD) is briefly introduced and some experiments for studing the effects of light source on the position precision of PSD are performed as wel1. It is proved that the fluctuation of light intensity can lead to the loss of the position precision of PSD, the results are far from those derived from theoretical analysis. At the same time, the experiments show that the backgroung niose can also exert certain effects on the ultimate position precision.