Chinese Optics Letters, 2007, 5 (9): 501, Published Online: Sep. 11, 2007
Characterization of planar photonic crystals using surface coupling techniques at large wavelengths 
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衍射光学 傅立叶变换光谱 椭偏仪 光子晶体 050.1970 Diffractive optics 300.6300 Spectroscopy, Fourier transforms 120.2130 Ellipsometry and polarimetry 310.3840 Materials and process characterization
Abstract
We report a non-destructive characterization of planar two-dimensional (2D) photonic crystals (PhCs) made in silicon on insulator (SOI) wafers using ellipsometric or Fourier transformed infrared (FTIR) spectroscope. At large wavelengths, devices behave as homogeneous isotropic materials defined by an effective filling factor. The experimental results related to the PhC limited dimensions confirm this characterization.
Y. Benachour, N. Paraire. Characterization of planar photonic crystals using surface coupling techniques at large wavelengths[J]. Chinese Optics Letters, 2007, 5(9): 501.
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