现代显示, 2012, 23 (12): 35, 网络出版: 2013-01-08
一种基于DVD读取头的非接触触发探头
A Non-contact Trigger Probe Based on DVD Pick-up Head
摘要
文章提出了一种基于DVD原理的非接触光学聚焦探头,它由商用DVD读取头改装而成,已经完成设计与制作。实验结果表明,此非接触探头分辨率优于1nm,测量重复性可达12 nm。目前此非接触触发探头已应用于纳米三坐标测量机上。
Abstract
This paper presents a non-contact trigger probe based on the commercial DVD pick-up head. The focus sensor and the mechanism have been designed and manufactured. Experimental results show that the non-contact trigger probe can obtains 1nm resolution and a repeatability of 12nm. The non-contact trigger probe can be used on a micro/nano CMM.
高伟, 陈晓怀, 陈贺. 一种基于DVD读取头的非接触触发探头[J]. 现代显示, 2012, 23(12): 35. GAO Wei, CHEN Xiao-huai, CHEN He. A Non-contact Trigger Probe Based on DVD Pick-up Head[J]. ADVANCED DISPLAY, 2012, 23(12): 35.