Photonics Research, 2020, 8 (9): 09001506, Published Online: Aug. 28, 2020   

Cascaded multilayer nano-kirigami for extensible 3D nanofabrication and visible light manipulation Download: 674次

Author Affiliations
1 Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurement (Ministry of Education), Beijing Key Laboratory of Nanophotonics & Ultrafine Optoelectronic Systems, and School of Physics, Beijing Institute of Technology, Beijing 100081, China
2 Beijing Engineering Research Center for Mixed Reality and Advanced Display, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China
3 Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
4 e-mail: juanliu@bit.edu.cn
5 e-mail: jiafangli@bit.edu.cn
Abstract
Nano-kirigami enables direct and versatile shape transformations from two-dimensional predesigns to three-dimensional (3D) architectures in microscale/nanoscale. Here a new and extensible strategy for cascaded multilayer nano-kirigami is demonstrated in a gold/silicon nitride (Au/SiN) bilayer nanofilm for 3D nanofabrication and visible light manipulation. By employing a focused ion-beam-based Boolean irradiation, rich 3D shape transformation and nested multilayer nanostructures are precisely manufactured, which are well reproduced by developing a modified mechanical model. Based on the multilayer and deformable features of the nano-kirigami structures, potentials in manipulating the phase and intensity of visible light are explored. The developed new nano-kirigami strategies, as well as the novel exotic 3D nanostructures, could be helpful to build a novel platform for 3D nanofabrication and find potential applications in microelectromechanical/nanoelectromechanical systems, holographic display, plasmonics, nanophotonics, biophotonics, etc.

Yu Han, Zhiguang Liu, Shanshan Chen, Juan Liu, Yongtian Wang, Jiafang Li. Cascaded multilayer nano-kirigami for extensible 3D nanofabrication and visible light manipulation[J]. Photonics Research, 2020, 8(9): 09001506.

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