Frontiers of Optoelectronics, 2015, 8 (4): 402, 网络出版: 2016-01-06  

Error compensation for three-dimensional profile measurement system

Error compensation for three-dimensional profile measurement system
作者单位
1 School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
2 Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China
摘要
Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2l.
Abstract
Three-dimensional (3D) profile measurement is an indispensable process for assisting the manufacture of various optic, especially aspheric surfaces. This work presents the measurement error calibration of a 3D profile measurement system, namely PMI700. Measurement errors induced by measuring tool radius, alignment error and the temperature variation were analyzed through geometry analysis and simulation. A quantitative method for the compensation of tool radius and an alignment error compensation model based on the least square method were proposed to reduce the measurement error. To verify the feasibility of PMI700, a plane and a non-uniform hyperboloidal mirror were measured by PMI700 and interferometer, respectively. The data provided by two systems were high coincident. The direct subtractions of results from two systems indicate RMS deviations for both segments were less than 0.2l.

Xu YE, Haobo CHENG, Zhichao DONG, Hon-Yuen TAM. Error compensation for three-dimensional profile measurement system[J]. Frontiers of Optoelectronics, 2015, 8(4): 402. Xu YE, Haobo CHENG, Zhichao DONG, Hon-Yuen TAM. Error compensation for three-dimensional profile measurement system[J]. Frontiers of Optoelectronics, 2015, 8(4): 402.

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