光电子技术, 2016, 36 (4): 217, 网络出版: 2016-12-21
IGZO TFT详解
Specification on IGZO TFT
摘要
论述了IGZO TFT技术的背景、技术优势和应用。详细介绍了IGZO TFT的结构, 性能和生产工艺, 并对IGZO TFT生产线存在的问题和发展趋势做出了展望。
Abstract
The background、advantages and application of the IGZO TFT technology were discussed, as well as the detailed report of the structure、performance and manufacturing process of IGZO TFT. The existing problems of production line and the prospects of development were presented in the end.
陶家顺. IGZO TFT详解[J]. 光电子技术, 2016, 36(4): 217. TAO Jiashun. Specification on IGZO TFT[J]. Optoelectronic Technology, 2016, 36(4): 217.