光学与光电技术, 2016, 14 (6): 77, 网络出版: 2016-12-23  

胶体微球单层薄膜的制备、表征及应用

Fabrication, Characteristics and Application of Monolayer Colloidal Microsphere Film
作者单位
1 华南理工大学广东省光电工程技术研究开发中心, 广东 广州 510640
2 广州现代产业技术研究院, 广东 广州 511458
摘要
为使用大面积均匀分布的微球掩模制作纳米柱LED,对胶体微球单层薄膜的自组装技术进行了研究。采用旋涂法、滴定法和气液界面法,对2 μm和455 nm两种粒径的胶体微球进行自组装实验,并使用扫描电子显微镜进行观察和比较,分析了三种方法的优缺点。实验结果表明,旋涂法在制备过程中容易出现多层堆积现象;滴定法容易形成单层薄膜,但胶体微球较为稀疏;气液界面法可以实现较大面积的单层薄膜,胶体微球均匀分布,而且适用于各种基片,是一种简单有效的自组装方法。优选气液界面法,在GaN基LED外延片上制备了均匀分布的纳米柱结构,验证了这种方法用于纳米柱LED芯片制备的可行性。
Abstract
In order to form a large area orderly microsphere lithography mask for the fabrication of nanorod light-emitting diodes (LEDs), the self-assembly techniques of monolayer colloidal microspheres are explored. The spin-coating method, liquid dropping method, and gas-liquid interfacial method are selected for self-assembly experiment using two kinds of colloidal microspheres with the sizes of 2 μm and 455 nm.The scanning electron microscope is used for profiles observation and results comparison. The advantages and disadvantages of these three methods are analyzed. It is shown that the spin-coating method is easy to obtain a multilayer microsphere film.Although the liquid dropping method may form a monolayer film, the distribution of colloidal microspheres is relatively sparse. Gas-liquid interfacial method can achieve a large area of the monolayer film, of which the colloid microspheres are distributed uniformly. Moreover, the method is suitable for various substrates. In a word, gas-liquid interfacial method is a simple and effective method of self-assembly. Finally, this method is selected to fabricate the nanorod structures with uniformly distribution on GaN-based LED epitaxial wafers, and is demonstrated in the fabrication of nanorod LEDs.

黄江柱, 黄华茂, 胡晓龙, 王洪. 胶体微球单层薄膜的制备、表征及应用[J]. 光学与光电技术, 2016, 14(6): 77. HUANG Jiang-zhu, HUANG Hua-mao, HU Xiao-long, WANG Hong. Fabrication, Characteristics and Application of Monolayer Colloidal Microsphere Film[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2016, 14(6): 77.

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