基于ISO11254国际标准,构建了基于半导体激光光散射检测光学薄膜损伤与否的光学薄膜激光损伤阈值测试系统。运用图像处理以及灰度值作为判断薄膜损伤与否的判据,对TiO2/SiO2增透膜进行了阈值测试。由图像处理可得,当光斑图像有效区域内灰度值最大的前50个像素点的平均灰度值在25到33之间时,该区域为薄膜损伤的临界区域,并将测量结果与在Veeco白光轮廓仪观测到的损伤形貌进行对比,具有较好的一致性。

The laser-induced damage threshold test system has been constructed according to the international standard of ISO 11254, which is based on the measurement of the scattered light of the diode laser. Image processing algorithm and the grey level of the image have been used to judge whether the film has been damaged. The threshold of anti-reflection coating deposited by TiO2 and SiO2 was performed according to ISO 11254 standard,ensuring the critical area of grey level is between 25 and 33 in the test system. The measured results were compared with that of scanning white-light interferometry profilometer.Both of them have a preferable consistency.