激光与光电子学进展, 2017, 54 (1): 010004, 网络出版: 2017-01-17
皮秒激光微纳加工研究进展 下载: 675次
Research Progress of Micro-Nano Fabrication by Picosecond Laser
激光技术 皮秒激光 再生放大 腔倒空 微纳加工 laser technique picosecond laser re-amplifier cavity dumping micro-nano fabrication
摘要
皮秒激光具有皮秒(10-12 s)量级的脉冲宽度, 与电光弛豫时间(10-6~10-12 s)相当或比电光弛豫时间更短。皮秒激光与材料作用时, 由于电子来不及将能量传递给晶格, 以至于整个加工过程中几乎没有热作用的存在, 被称为“冷烧蚀”过程, 因此皮秒激光在航空航天、**、材料、医学、生物等领域的精密加工中有广泛的用途。简要介绍了研制适用于微纳加工的皮秒激光器的技术路线, 综述了皮秒激光在高硬度金属精密制孔、硬脆性材料切割以及材料表面选择性去除方面的研究进展, 探讨了目前皮秒激光微纳加工存在的问题, 并展望了其可能的发展方向。
Abstract
Picosecond laser has picosecond (10-12 s) pulse width, which is the same as the electro-optical relaxation time (10-6-10-12 s) or even shorter. When picosecond laser interacts with materials, there is no enough time for electron to transfer the energy to crystal lattice. Therefore, there's little heating effect during fabrication, which is called cold ablation. This technology is widely used for precision machining in astronautics, national defense, materials, medical science, biological science and so on. The technique of micro-nano fabrication by picosecond lasers is introduced and the precision drilling on high hardness metal, the hard and brittle materials cutting and the selective surface removal with picosecond lasers are summarized. The challenges and future trends of micro-nano fabrication by picosecond lasers are pointed out.
杨冬冬, 蔡京辉. 皮秒激光微纳加工研究进展[J]. 激光与光电子学进展, 2017, 54(1): 010004. Yang Dongdong, Cai Jinghui. Research Progress of Micro-Nano Fabrication by Picosecond Laser[J]. Laser & Optoelectronics Progress, 2017, 54(1): 010004.