滤波器是信号传输系统中的重要组件.提出一种快速、高精度复制工艺方法, 用于设计和制备WR-10波段矩形波导滤波器.采用多层匀胶单次紫外曝光工艺(硅片上匀SU-8胶), 制备出的滤波器高度误差小于0.03%(3 μm), 陡直度误差小于1.1o.实验结果表明, 用该方法制备毫米波滤波器技术可行, 并取得了卓越的电磁性能(关于: 插入损耗, 回波损耗和带宽).最终测试结构可知, 通带内的插入损耗测得结果小于0.5 dB, 几乎可以忽略不计, 在整个通带内回拨损耗大于10 dB.结果表明, 这种快速制造技术是制备太赫兹射频器件的一种有效办法, 这种新技术将成为推动太赫兹射频器件未来发展的主要动力.

Filters are essential components of communication systems. A rapid and accurate fabrication method is presented in this paper for the design and fabrication of a waveguide filter. The filter was fabricated by using a multi-layer coating and one-time ultraviolet exposure lithography (SU-8 resist on a silicon wafer) to have dimensional fabrication errors of less than 3 μm in height and 1.1° in vertical angle deviation. We demonstrated the feasibility of the proposed class of filters and the fabrication method used and achieved a superior performance (with regard to: insertion loss, return loss, and bandwidth). Consequently the minimum passband insertion loss, which is practically negligible, was measured as being less than 0.5 dB while the return loss is greater than 10 dB during the passband, demonstrating that the chosen rapid fabrication technology is an effective method of terahertz device fabrication. The new technology should become a major driving force forging the future development of terahertz RF devices.