微电子机械系统(MEMS)半球谐振陀螺是MEMS微陀螺领域的研究热点, 能工作在角速度积分模式下, 具有体积小、质量轻、功耗低、成本低、对称性高、Q值高, 以及精度高等优点。文章给出了一种微型半球谐振陀螺的结构, 研究了其工作原理以及检测方法, 设计了一种数字式MEMS半球谐振陀螺仪的角速度积分工作模式方案及其FPGA实现方法, 以完成目前MEMS半球谐振陀螺的角速度积分模式的控制与检测工作。

The MEMS (Micro-Electro-Mechanical System) HRG(Hemispherical Resonator Gyroscope) as a kind of MEMS gyroscopes is a research hotspot, which can work in the RIG (Rate-Integrating-Gyroscope) mode. The emergence of MEMS gyroscopes has produced sensors with smaller size, lower cost, lighter weight, less consuming power, high symmetry, high Q-factor and high accuracy than previous solutions. In this paper, the structure of a MEMS HRG was proposed and the working principles and detection methods were studied. In order to accomplish the work of control and detection of MEMS RIG mode for MEMS HRG, a digital scheme for the MEMS RIG with hemispherical resonator was developed and a FPGA platform was designed.