红外技术, 2017, 39 (3): 288, 网络出版: 2017-04-10
MEMS红外光源光谱特性及温度特性测试研究
Research on Spectral and Temperature Characteristic Test of MEMS Infrared Light Source
MEMS红外光源 辐射光谱 光谱测试 温度特性 MEMS infrared light source radiation spectrum spectral testing temperature characteristic
摘要
MEMS红外光源是基于微机电系统(MEMS)制造工艺的红外光源器件，为明确 MEMS红外光源的辐射光谱分布特性和温度特性，采用 SR5000光谱辐射计对 MEMS红外光源进行辐射光谱分布特性测试，所得数据表明所选光源的红外光谱分布主要在 3～5 μm之间，中心波长位于 3.6 μm，该波段红外光具有接近 90%的大气透过率；采用红外测温仪和热敏电阻对光源辐射体温度进行测试，结果显示所选 MEMS红外光源温度特性优良，适用范围广泛。
Abstract
MEMS infrared light source is based on micro-electromechanical system (MEMS) fabrication technology. To clarify the radiation spectral distribution characteristic and temperature characteristic, a SR5000 spectrora diameter was adopted for testing MEMS infrared light radiation spectral distribution. The results show that the infrared spectrum of the light source selected mainly distributes between 3-5 μm, and the center wavelength is at 3.6 μm. The infrared thermometer and thermistor had been taken to test the light radiation temperature. The results show that the temperature characteristic of the selected MEMS infrared light source is excellent, and the light source has a wide scope of application.
张鹏, 丑修建, 刘立, 王二伟, 张辉. MEMS红外光源光谱特性及温度特性测试研究[J]. 红外技术, 2017, 39(3): 288. ZHANG Peng, CHOU Xiujian, LIU Li, WANG Erwei, ZHANG Hui. Research on Spectral and Temperature Characteristic Test of MEMS Infrared Light Source[J]. Infrared Technology, 2017, 39(3): 288.
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