为了克服主客掺杂型有源材料均匀性和稳定性差的问题, 采用键合掺杂方法, 将高温热解法制备的油酸修饰掺铒氟钇钠纳米晶粒与甲基丙烯酸甲酯发生共聚反应, 形成键合型有源芯层材料。纳米晶粒均匀固定在聚合物分子链上, 抑制了高浓度掺杂时的团聚析出且材料更稳定。纳米粒子在聚合物中的质量百分比达到约1wt%, 具有良好的成膜性, 用原子力显微镜照片观察薄膜表面粗糙度为1.76 nm。用椭偏仪测量薄膜光学性质, 并用柯西色散模型拟合出薄膜折射率随波长的变化关系, 材料在1 550 nm信号光波长的折射率为1.485。设计嵌入式波导结构, 采用有限元方法进行模式分析和计算光场强度分布。采用紫外光刻和感应耦合等离子体刻蚀工艺制备凹槽形下包层, 填充有源材料制备条形波导放大器。实验结果表明, 当1 550 nm信号光功率为0.1 mW, 1 480 nm泵浦光功率为390 mW时, 在1.2 cm长的样品中得到了3.58 dB的信号光相对增益。

In order to improve the uniformity and stability of the rare earth doped active materials, a copolymerization typed material is presented to fabricate the waveguide amplifiers. Oleic acid (OA)-NaYF4∶Er nanoparticles are synthesized by the high-temperature pyrolysis, and the active core materials are prepared by the copolymerization of the outermost oleic acid of the nanoparticles and methylmethacrylate(MMA). The concentration of nanoparticles in the active materials is about 1wt%. Atomic force microscopy image shows that the active film is very smooth, and the root mean square is about 1.76 nm. Ellipsometry is used to measure the refractive index of the material, which is about 1.485 at 1 550 nm wavelength. Embedded single-mode waveguides are designed. The distributions of electric field intensity and the transmission mode are simulated by finite element method. The waveguide amplifiers are prepared by the photolithography and inductively coupled plasma. The experimental results show that the relative gains of 3.58 dB is obtained in a 1.2 cm long device, when the pump power is 390 mW at 1 480 nm wavelength and the signal power is 0.1 mW at 1 550 nm wavelength.