光学仪器, 2017, 39 (2): 53, 网络出版: 2017-06-06
基于五棱镜扫描法的波前系统研究
Wavefront system detection based on pentaprism scanning method
五棱镜 波前检测 大口径光学波面 模拟仿真 曲线拟合 pentaprism wavefront detection large aperture optical wavefront simulation curve fitting
摘要
为检测基于五棱镜扫描法的大口径光学系统波前检测法,以口径为513 mm的仿真模拟波面为被测波面进行模拟仿真检测试验,使用通光口径为5 mm的五棱镜对被测波面进行模拟二维扫描检测。根据实验结果拟合出被测波面的二维特性曲线,再利用二维特性曲线对被测波面进行三维拟合,并分析实验中可能存在的误差。实验结果表明,模拟波面与被测波面吻合,证实了这种方法可行并且在一定条件下能进行高精度检测。
Abstract
A large aperture and high precision optical system is required for optical wavefront detection.This article conducts simulation for the optical wavefront caliber of 513 mm.Aperture of 5 mm pentaprism is used for two-dimensional scanning detection of wavefront.The experimental results of the measured wavefront are fitted to the characteristic curve.The fitting characteristic curve is used to recover the three-dimensional wavefront.The errors in the experiment are analyzed.Simulation and experimental results fit very well,verifying the feasibility and that the method can perform highly precise detection.
刘齐卉芝, 何勇. 基于五棱镜扫描法的波前系统研究[J]. 光学仪器, 2017, 39(2): 53. LIU Qihuizhi, HE Yong. Wavefront system detection based on pentaprism scanning method[J]. Optical Instruments, 2017, 39(2): 53.