基于传统的光刻和化学湿法腐蚀工艺, 通过卷曲技术, 提出一种三维管状量子阱红外探测器.该管状器件相比于未卷曲的平面器件, 在垂直入射光照下, 展现了优良的暗电流、黑体响应和光电流响应率特性曲线.当工作温度60 K、偏置电压0.45 V时, 管状器件峰值响应率为20.6 mA/W, 峰值波长3.62 μm, 最大量子效率2.3%.从几何光学的角度分析了管状器件的垂直光吸收原理, 进而揭示了一种特殊的光耦合方式.测试了不同角度入射光照射下的光电流响应率谱.由于微管的近似圆形对称性, 器件具有很宽的视角, 有助于红外探测系统的设计.

A three-dimensional tubular quantum well infrared photodetector (QWIP) was demonstrated via rolled-up technology, which is on the basis of conventional lithography and wet chemical etching. When the tubular QWIPs and the corresponding planar devices were illuminated by the vertically-incident light, their dark current, blackbody response, and photocurrent responsivity spectra were characterized. Under the operating temperature of 60 K and the bias of 0.45 V, a peak responsivity of 20.6 mA/W and a peak quantum efficiency of 2.3% at the peak response wavelength of 3.62 μm were obtained in the tubular devices. By clarifying the principle of optical absorption, the tubular QWIP presents a novel optical coupling manner. The photocurrent responsivity spectra of the device for the external light were further studied at different incident angles. It is shown that with the approximately circular symmetry of the microtubes, the tubular devices have a wide perspective, which is advantageous to the design of infrared detection system.