光学学报, 2017, 37 (6): 0631001, 网络出版: 2017-06-08
基于量子进化算法的宽角度极紫外多层膜设计 下载: 552次
Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm
薄膜 多层膜设计 量子进化算法 宽角度极紫外多层膜 thin films design of multilayer coatings quantum evolutionary algorithm broad-angle extreme ultraviolet multilayers
摘要
提出了一种基于实数编码量子进化算法(RQEA)的宽角度极紫外(EUV)多层膜理论膜系的设计方法。采用基于实数编码的遗传算法(RGA)和RQEA对宽角度Mo/Si多层膜进行了理论设计和分析, 发现RQEA具有种群规模小、搜索效率高和求解精度高的明显优势, 体现出RQEA在光学薄膜设计领域的潜在应用价值。同时, 设计出入射光波长为13.5 nm、在入射角0°~18°范围内反射率可达50%的宽反射带Mo/Si多层膜。
Abstract
A design approach of the theoretical film system with broad-angle extreme ultraviolet (EUV) multilayers coatings based on the real-coded quantum evolutionary algorithm (RQEA) is proposed. Based on the RQEA and the real-coded genetic algorithm (RGA), the theoretical design and analysis for Mo/Si multilayers coatings with broad angles is performed. It is found that the RQEA has obvious advantages of small population, high efficiency, and high accuracy, which makes the RQEA possess potential application value in the field of optical film design. In addition, the broadband Mo/Si multilayer coatings with reflectivity of up to 50% at incidence angle of 0°-18° and at incident wavelength of 13.5 nm are designed.
张超, 张杰瑞, 王一名, 匡尚奇, 谢耀. 基于量子进化算法的宽角度极紫外多层膜设计[J]. 光学学报, 2017, 37(6): 0631001. Zhang Chao, Zhang Jierui, Wang Yiming, Kuang Shangqi, Xie Yao. Design of Broad-Angle Extreme Ultraviolet Multilayer Coatings Based on Quantum Evolutionary Algorithm[J]. Acta Optica Sinica, 2017, 37(6): 0631001.