Chinese Optics Letters, 2017, 15 (8): 081202, Published Online: Jul. 20, 2018
Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing 
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120.0120 Instrumentation, measurement, and metrology 120.4630 Optical inspection 150.1835 Defect understanding
Abstract
There exist some shallow scratch defects on the super-smooth optical surface. Their detection has a low efficiency with the existing technologies. So a new detection method, dark-field detection of adaptive smoothing and morphological differencing (DFD-ASMD), is proposed. On one hand, the information of shallow scratches can be kept in dark-field images. On the other hand, their weak characteristics can be separated and protected from being overly reduced during the elimination of noise and background in the image. Experiments show the detection rate of shallow scratches is around 82%, and DFD-ASMD can lay a foundation for quality control of defects on the high-quality optical surface.
Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu. Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing[J]. Chinese Optics Letters, 2017, 15(8): 081202.
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