溶液法印刷制备电子器件因具有绿色环保、低成本、流程简单、柔性好和适应性强等优良特性, 受到世界各个国家的重视, 尤其高性能薄膜晶体管是平板显示和消费电子行业的基石, 更成为了研究的热点。本文综述了基于溶液法氧化物薄膜晶体管印刷制备的最新研究进展, 详细讨论了印刷氧化物薄膜晶体管结构优化、半导体层材料、电极层材料和绝缘层材料以及相关前驱体选择等, 指出了提升器件性能的关键, 明确了器件后处理与稳定性的关系。最后, 本文总结了氧化物薄膜晶体管在印刷制备和应用过程中存在的问题以及发展前景。

In recent years, solution method for electronic device print fabrication has garnered increasing interest and attention due to their green, low-cost, simple process, flexible and good adaptive, particularly in high-performance oxide semiconductor thin film transistor in flat panel display and consumer electronics industries. This review reported latest progresses of print oxide semiconductor TFT including structure optimization, semiconductor layer material, electrode layer material, insulating layer material and associated precursor selection. The relationship between device stability and post-treatment is described clearly, and the key of performance promotion is found. Moreover, several personal insights on the existing challenges and future research direction of print oxide semiconductor TFT are considered based on current advances.