激光与光电子学进展, 2017, 54 (10): 103102, 网络出版: 2017-10-09
常温下ZnO/Ag/ZnO复合薄膜的制备及其光电特性 下载: 607次
Fabrication and Opto-Electronic Properties of ZnO/Ag/ZnO Composite Films at Room Temperature
薄膜 ZnO/Ag/ZnO复合薄膜 电子束蒸发 射频磁控溅射 光电特性 thin films ZnO/Ag/ZnO composite films electron beam evaporation radio frequency magnetron sputtering opto-electronic properties
摘要
采用射频磁控溅射与电子束蒸发的方式, 制备了ZnO/Ag/ZnO三层复合薄膜, 研究了Ag薄膜厚度以及电子束蒸发的沉积速率对复合薄膜光电性能的影响。实验结果表明, 当Ag薄膜厚度为8 nm、电子束蒸发的沉积速率为0.5 nm·s-1时, 复合薄膜的性能最优, 其方块电阻为6.01 Ω,波长400~800 nm范围内的光平均透过率为91.39%。优化后的ZnO/Ag/ZnO复合薄膜具有良好的光电特性。
Abstract
ZnO/Ag/ZnO three-layer composite films are fabricated by means of radio frequency magnetron sputtering and electron beam evaporation. The influences of Ag film thicknesses and electron beam evaporation deposition rates on the opto-electronic properties of composite films are investigated. The experimental results show that, when the thickness of Ag films is 8 nm and the deposition rate of electron beam evaporation is 0.5 nm·s-1, the properties of composite films are optimal. The square resistance is 6.01 Ω and the average transmissivity of light whose wavelength is at range of 400 nm and 800 nm is 91.39%. The ZnO/Ag/ZnO composite films have good opto-electronic properties after optimization.
郭凯, 于涛, 宋斌斌, 李新连, 赵树利. 常温下ZnO/Ag/ZnO复合薄膜的制备及其光电特性[J]. 激光与光电子学进展, 2017, 54(10): 103102. Guo Kai, Yu Tao, Song Binbin, Li Xinlian, Zhao Shuli. Fabrication and Opto-Electronic Properties of ZnO/Ag/ZnO Composite Films at Room Temperature[J]. Laser & Optoelectronics Progress, 2017, 54(10): 103102.