光子学报, 2017, 46 (9): 0912008, 网络出版: 2017-10-16
基于Zernike多项式拟合三平面互检的误差分析
Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting
光学检测 绝对检测 干涉法 Zernike多项式 测量误差 计算仿真 Optical testing Absolute test Interferotry Zernike polynomials Measurement error Computer simulation
摘要
基于Zernike多项式拟合三平面互检法,在理论上对光轴偏离、旋转角度以及有效面积对不同面型精度平面的测量误差进行了分析,并分别进行了实验验证.研究结果表明,旋转角度误差和有效面积对测量影响不敏感,可适当降低标定旋转角度成本;而光轴偏离对测量精度影响明显,在高精度面型绝对检测中应对其进行严格校准.
Abstract
Based on Zernike polynomials fitting, the measurement errors posed by optical axis deviation, rotation angle and active area on different types of high-precision surface were analyzed and the experimental verifications were conducted respectively. The results show that the measurement is not sensitive to the rotation angle and active area, the cost of calibrated rotation angle can therefore be reduced, while the impact of optical axis deviation on measurement precision is rather significant, which should be strictly adjusted before the test on high-precision surface.
高飞, 李晋惠, 田爱玲, 刘丙才, 李世杰, 岳鑫. 基于Zernike多项式拟合三平面互检的误差分析[J]. 光子学报, 2017, 46(9): 0912008. GAO Fei, LI Jin-hui, TIAN Ai-ling, LIU Bing-cai, LI Shi-jie, YUE Xin. Error Margin Analysis of Three-flat Test Based on Zernike Polynomials Fitting[J]. ACTA PHOTONICA SINICA, 2017, 46(9): 0912008.