为实现扫描振镜驱动电路的自主化，使其具有维修性和互换性，对高速扫描振镜的伺服控制理论进行了研究，并对反射镜进行了ANSYS有限元谐响应分析。在理论研究和仿真的基础上，完成伺服控制电路设计，其设计仿真结果可满足热像仪的应用需求。与国外同类扫描伺服控制电路性能进行了对比测试，响应时间小于2 ms，跟随稳定。测试结果表明，自主设计的扫描振镜伺服控制电路性能能够达到热像仪的使用要求。

To improve the maintenance possibility of galvanometer scanner servo circuit, the servo control theory of galvanometer scanner is studied carefully, and finite element analysis of the scanner mirror is realized via ANSYS software. Based on the theoretical analysis and simulation, the galvanometer scanner servo circuit has been designed, and the simulation results show that it can satisfy the application requirements of thermal imager. Verified by experiments and compared with imported servo circuit board, the response time is less than 2 seconds, and the servo performance is stable. The test result shows that the performance of the self-designed galvanometer scanner servo circuit reaches the request of thermal imager.