红外与毫米波学报, 2017, 36 (5): 550, 网络出版: 2017-11-21
多胞MOSFET器件的射频建模和参数提取
Radio-Frequency modeling and parameters extraction of multi-cell MOSFET device
半导体技术 小信号模型 模型参数提取 趋肤效应 多胞模型 semi-conductor technology small-signal model parameter extraction of model skin effect multi-cell model
摘要
对纳米级金属氧化物半导体场效应管器件提出了改进的小信号模型.该改进模型中综合考虑了馈线的趋肤效应和器件多胞结构的影响.提取过程中, 根据可缩放规律, 由传统模型的参数推导出元胞参数.将模型应用于8×0.6×12 μm (栅指数×栅宽×元胞数量)、栅长为90 nm的MOSFET器件在1~40 GHz范围内的建模, 测试所得S参数和模型仿真所得S参数能够高度地吻合.
Abstract
An improved small-signal model for nanometer metal-oxide-semiconductor field-effect transistor (MOSFET) device is presented in this paper. The skin effect and multiple-cell effect are both taken into account. In the extracting procedure, the parameters of elementary cells are determined from the conventional model based on the scalable rules. This small-signal model was validated by the good agreement between measured and simulated S-parameters of 8×0.6×12 μm (number of gate fingers×unit gatewidth×cells) 90-nm gatelength MOSFET under three bias points up to 40 GHz.
周影, 于盼盼, 高建军. 多胞MOSFET器件的射频建模和参数提取[J]. 红外与毫米波学报, 2017, 36(5): 550. ZHOU Ying, YU Pan-Pan, GAO Jian-Jun. Radio-Frequency modeling and parameters extraction of multi-cell MOSFET device[J]. Journal of Infrared and Millimeter Waves, 2017, 36(5): 550.