有机无机杂化钙钛矿材料被广泛应用于光电器件领域，特别是其作为太阳能电池的吸光材料，受到学术界和工业界越来越多的关注。钙钛矿太阳能电池的产业化进程正在进行中，而在进一步降低制备成本、提高电池转换效率的同时，研究出一种操作简单且可重复性高的制备钙钛矿薄膜的技术具有十分重要的意义。与其他传统的溶液处理方法不同，蒸汽辅助溶液过程（VASP）处理法避免了薄膜在生长过程中溶解以及溶剂化作用，抑制了晶核的形成，使薄膜快速重组，获得致密的高质量钙钛矿薄膜。目前报道，基于此薄膜制备的平面结构钙钛矿太阳能电池转换效率高达168%。本文综述了低温（＜150 ℃）VASP法制备的钙钛矿薄膜及光伏器件的相关研究进展，并对该技术的产业化前景做了展望。VASP制备过程简单、薄膜性能优异且可重复性高，为进一步制备大面积、高质量薄膜提供了可能。

Hybrid perovskites (e.g., CH3NH3PbX3, X represents a halide) are attracting more and more attention from both industry and academic due to their widely applications in the field of photoelectric device, especially as light absorption material in solar cells. The process of industrialization of perovskite solar cells is in progress, and in the pursuit of low-cost and efficient perovskite PV technology, it is crucial to develop a facile and high reproducible technique for preparing perovskite films. Unlike other conventional solution treatments, the vapor-assisted solution process(VASP) treatment avoids the dissolution and solvation of the film during growth, inhibits the formation of crystal nucleus and allows rapid recombination of the film to obtain dense high-quality perovskite film. At present, the conversion efficiency of planar structure perovskite solar cells based on this film is reaching up to 168%. In this paper, the research progress of perovskite thin films and photovoltaic devices prepared by low temperature(＜150 ℃) VASP method is reviewed. This paper also prospects the industrialization of the technology. VASP has the advantages of simple preparation process, excellent performance and high reproducibility, which provides the possibility of further preparation of large-area and high-quality film.