Photonics Research, 2017, 5 (6): 06000702, Published Online: Dec. 7, 2017
High-efficiency normal-incidence vertical p-i-n photodetectors on a germanium-on-insulator platform Download: 813次
(230.5160) Photodetectors (230.5170) Photodiodes (230.0250) Optoelectronics (160.6000) Semiconductor materials (310.6845) Thin film devices and applications.
Abstract
In this paper, normal incidence vertical p-i-n photodetectors on a germanium-on-insulator (GOI) platform were demonstrated. The vertical p-i-n structure was realized by ion-implanting boron and arsenic at the bottom and top of the Ge layer, respectively, during the GOI fabrication. Abrupt doping profiles were verified in the transferred high-quality Ge layer. The photodetectors exhibit a dark current density of ~47 mA/cm2 at ?1 V and an optical responsivity of 0.39 A/W at 1550 nm, which are improved compared with state-of-the-art demonstrated GOI photodetectors. An internal quantum efficiency of ~97% indicates excellent carrier collection efficiency of the device. The photodetectors with mesa diameter of 60 μm exhibit a 3 dB bandwidth of ~1 GHz, which agrees well with theoretical calculations. The bandwidth is expected to improve to ~32 GHz with mesa diameter of 10 μm. This work could be similarly extended to GOI platforms with other intermediate layers and potentially enrich the functional diversity of GOI for near-infrared sensing and communication integrated with Ge CMOS and mid-infrared photonics.
Yiding Lin, Kwang Hong Lee, Shuyu Bao, Xin Guo, Hong Wang, Jurgen Michel, Chuan Seng Tan. High-efficiency normal-incidence vertical p-i-n photodetectors on a germanium-on-insulator platform[J]. Photonics Research, 2017, 5(6): 06000702.