光电子技术, 2017, 37 (2): 104, 网络出版: 2017-12-25
SOI基级联双微环滤波器研究
Research of SOI Series-coupled Double-ring Resonator Filters
摘要
研究了基于绝缘衬底上的硅(SOI)材料的微环谐振器,实现了光滤波器的功能。采用电子束直写和干法刻蚀等工艺制作出SOI基微环谐振器,微环半径为74 μm。测试结果表明,器件的自由频谱宽度(FSR)为1.238 nm,1 550 nm波长附近的抑制比大于10 dB。通过对微环谐振器进行热调谐,在0~4 V电压范围内实现了大于一个FSR的可调谐滤波特性。
Abstract
The microring resonator based on silicon-on-insulator was researched and used to achieve optical filter. The SOI microring resonator was fabricated by E-beam lithography and dry etch process. The radius of the microring resonator is 74 μm. The free spectrum range (FSR) of the device is measured to be 1.238 nm. And the rejection ratio of the series-coupled double-ring resonator at wavelength of 1 550 nm is greater than 10 dB. Finally, the device can be thermally tuned by applying power to the heaters. When the heating voltage is 4 V, the filtering profile is tuned for over one FSR.
顾晓文, 牛斌, 郁鑫鑫. SOI基级联双微环滤波器研究[J]. 光电子技术, 2017, 37(2): 104. GU Xiaowen, NIU Bin, YU Xinxin. Research of SOI Series-coupled Double-ring Resonator Filters[J]. Optoelectronic Technology, 2017, 37(2): 104.