光电子技术, 2017, 37 (3): 186, 网络出版: 2017-12-25   

ITO薄膜方块电阻值在低温下随温度的变化关系

The Relationship between the ITO Film Square Resistance and Temperature at Low Temperature Circumstances
张勇 1,2,3,4,*彭继 1,2,3,4赵松 1,2,3,4丁慧林 1,2,3,4赵玉冬 1,2,3,4陈召全 1,2,3,4
作者单位
1 中航华东光电有限公司, 安徽 芜湖 241002
2 安徽省现代显示技术重点实验室, 安徽 芜湖 241002
3 国家特种显示工程技术研究中心, 安徽 芜湖 241002
4 特种显示国家工程实验室, 安徽 芜湖 241002
摘要
探讨低温下的ITO薄膜方块电阻值随温度的变化关系, 为军用特种显示器在极端低温环境下的加热功耗设计提供理论依据。通过测量ITO薄膜加热器电极电阻值随温度的变化量, 研究温度(低温)对ITO薄膜导电性能的影响。实验结果表明: ITO薄膜的导电性能在低温下随着温度的降低而提高; 低温下的ITO薄膜方块电阻值与温度之间呈一元二次函数关系变化; ITO薄膜的膜层越厚, 低温下其方块电阻值降低越明显, 导电性越高; 当环境温度由常温(25℃)降至-50 ℃时, 几种不同膜厚的ITO薄膜方块电阻值分别平均降低5.55 %、5.01 %和2.77 %, 对应的功耗平均增加5.88 %、5.28 %和2.85 %。该试验结果为军用特种显示器在极端低温环境下的加热功耗设计提供了理论依据。
Abstract
The relationship between the resistance of the ITO film and the temperature in low-temperature conditions were studied, providing a theoretical basis for the design of the military special display in the extreme low temperature environment. In this paper, conductivity at low temperatures of the ITO films has been studied by experimental method. It is found that the conductive effect of the ITO films would enhance when the temperature reduces at low temperature. The relationship between temperature and square resistance of the ITO films was quadratic equation with one unknown at low temperature. The thicker the ITO film was, the more obvious the reduction of the block resistance was at low temperature, and the higher conductivity was. When the environment temperature dropped from room temperature (25℃) to -50℃, the square resistance of ITO films with different thickness reduced by an average of 5.55%, 5.01% and 2.77%, respectively, and the corresponding average power consumption increased by 5.88%, 5.28% and 2.85%. The test results have practical meaning for the heating power design of military special display in extreme low temperature environment.

张勇, 彭继, 赵松, 丁慧林, 赵玉冬, 陈召全. ITO薄膜方块电阻值在低温下随温度的变化关系[J]. 光电子技术, 2017, 37(3): 186. ZHANG Yong, PENG Ji, ZHAO Song, DING Huilin, ZHAO Yudong, CHEN Zhaoquan. The Relationship between the ITO Film Square Resistance and Temperature at Low Temperature Circumstances[J]. Optoelectronic Technology, 2017, 37(3): 186.

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