首页 > 论文 > 中国光学 > 10卷 > 6期(pp:699-707)

双压电片镜在同步辐射光源光学系统中的应用

Application of bimorph mirror in the optical system of synchrotron radiation light source

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

介绍了双压电片镜自适应光学技术, 同时为其在同步辐射光学领域中的应用与进一步发展提供前瞻性的思考与探索。根据目前已公开发表的相关文献资料, 总结介绍了双压电片镜自适应光学技术, 阐述了该技术的工作机理与关键参数, 并对其在国际上具有代表性的同步辐射机构中的应用情况作出描述, 并指出涉及的关键技术问题与未来的发展趋势: 不仅要有效地解决“连接点效应”对双压电片镜技术的负面影响, 还要实现亚微米乃至纳米级的聚焦光斑, 这两项内容都是双压电片镜技术需要进一步解决的重要问题。未来, 双压电片镜自适应光学技术可望在我国先进的第三代同步辐射装置—“上海光源(Shanghai Synchrotron Radiation Facility,SSRF)”二期工程建设中得到应用。

Abstract

In this paper, the adaptive optics technology of bimorph mirror(BM) is introduced, and its application and further development in the field of synchrotron radiation are prospected. Based on the existing published literatures, this paper summarizes the adaptive optics technology of the BM, introduces the working mechanism and key parameters of the technology, and describes its application in internationally representative synchrotron radiation units, and points out the key technical issues involved and future trends. It is found that not only to solve the negative effect of so-called “junction effect” on the technology of BM, but also to produce sub-micrometer and even nanometer sized focal spots, both are the critical issues for the future development of the proposed BM technique. This adaptive optics technique is expected to be used in the phase II construction of the advanced third generation synchrotron radiation light source in China, i.e., Shanghai Synchrotron Radiation Facility(SSRF).

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O434

DOI:10.3788/co.20171006.0699

所属栏目:综述

基金项目:国家自然科学基金资助项目(No.11175243)

收稿日期:2017-06-11

修改稿日期:2017-08-13

网络出版日期:--

作者单位    点击查看

金利民:中国科学院 上海应用物理研究所 张江园区, 上海 201204
罗红心:中国科学院 上海应用物理研究所 张江园区, 上海 201204
王 劼:中国科学院 上海应用物理研究所 张江园区, 上海 201204
王纳秀:中国科学院 上海应用物理研究所 张江园区, 上海 201204
徐中民:中国科学院 上海应用物理研究所 张江园区, 上海 201204

联系人作者:金利民(lmjin@sinap.ac.cn)

备注:金利民(1984—), 男, 江苏盐城人, 博士, 助理研究员, 2009年、2012年分别于东华大学获得硕士、博士学位, 主要从事同步辐射光学与技术方面的研究。

【1】麦振洪.同步辐射光源及其应用[M].北京:科学出版社,2013.
MAI ZH H. Synchrotron Radiation Light Source and Its Application[M]. Beijing:Science Press,2013.(in Chinese)

【2】徐朝银.同步辐射光学与工程[M].合肥:中国科学技术大学出版社,2013:43-53.
XU CH Y. Optics and Engineering of Synchrotron Radiation[M]. Hefei:University of Science and Technology of China Press,2013:43-53.(in Chinese)

【3】罗红心,王劼,肖体乔.同步辐射用光学元件的检测[J].中国激光,2009,36(s2):134-139.
LUO H X,WANG J,XIAO T Q. Optical elements metrology in synchrotron radiation[J]. Chinese J. Lasers,2009,36(s2):134-139.(in Chinese)

【4】林维豪,罗红心,宋丽,等.同步辐射用光学元件面形绝对检测方法的研究[J].光学学报,2012,32(9):0912005-1.
LIN W H,LUO H X,SONG L,et al.. Absolute flatness measurement of optical elements in synchrotron radiation[J]. Acta Optica Sinica,2012,32(9):0912005-1.(in Chinese)

【5】曲艳峰,吕丽军.同步辐射仪器中柔性铰链压弯机的研究[J].光学 精密工程,2002,10(2):220-225.
QU Y F,LV L J. Research on the flexural hinge-based bender in a synchrotron radiation instrument[J]. Opt. Precision Eng.,2002,10(2):220-225.(in Chinese)

【6】黄志刚,董晓浩,高飞,等.X射线衍射和散射光束线环面聚焦镜的面形精度与像差分析[J].光学 精密工程,2004,12(1):26-30.
HUANG ZH G,DONG X H,GAO F,et al.. Slope error and aberration analysis for XRDX beamline toroidal focusing mirror[J]. Opt. Precision Eng.,2004,12(1):26-30.(in Chinese)

【7】孙福权,傅远,祝万钱,等.压弯镜系统自重平衡多点调节方法的研究[J].核技术,2011,34(4):246-250.
SUN F Q,FU Y,ZHU W Q,et al.. A study on multi-point gravity compensation of mirror bending system[J]. Nuclear Techniques,2011,34(4):246-250.(in Chinese)

【8】卢启鹏,高飒飒,彭忠琦.同步辐射水平偏转压弯镜面形误差分析与补偿[J].光学 精密工程,2011,19(11):2644-2650.
LU Q P,GAO S S,PENG ZH Q. Analysis and compensation of slope error for synchrotron radiation horizontal deflected mirror[J]. Opt. Precision Eng.,2011,19(11):2644-2650.(in Chinese)

【9】KOKOROWSKI S A. Analysis of adaptive optical elements made from piezoelectric bimorphs[J]. J. Optical Society of America,1979,69(1):181-187.

【10】LIPSON S G,RIBAK E N,SCHWARTZ C. Bimorph deformable mirror design[C]. Proceedings of SPIE,Adaptive Optics in Astronomy,1994,2201:703-714.

【11】SCHWARTZ C,RIBAK E,LIPSON S G. Bimorph adaptive mirrors and curvature sensing[J]. J. Optical Society of America A-Optics Image Science and Vision,1994,11(2):895-902.

【12】SUSINI J,LABERGERIE D,ZHANG L. Compact active/adaptive X-ray mirror-bimorph piezoelectric flexible mirror[J]. Review of Scientific Instruments,1995,66(2):2229-2231.

【13】SIGNORATO R,HIGNETTE O,GOULON J. Multi-segmented piezoelectric mirrors as active/adaptive optics components[J]. Journal of Synchrotron Radiation,1998,5:797-800.

【14】SIGNORATO R,SOLE V A ,GAUTHIER C. Performance of the ESRF ID26 beamline reflective optics[J]. J. Synchrotron Radiation,1999,6:176-178.

【15】SIGNORATO R,CARRé J F,ISHIKAWA T. Performance of the SPring-8 modular piezoelectric bimorph mirror prototype[C]. Proceedings of SPIE,X-ray Mirrors,Crystals and Multilayers,2001,4501:76-87.

【16】SIGNORATO R,ISHIKAWA T. R&D on third generation multi-segmented piezoelectric bimorph mirror substrates at SPring-8[J]. Nuclear Instruments and Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment,2001,467:271-274.

【17】ALCOCK S G,SUTTER J P,SAWHNEY K J S,et al.. Bimorph mirrors: the good, the bad, and the ugly[J]. Nuclear Instruments and Methods in Physics Research A,2013,710:87-92.

【18】SAWHNEY K,ALCOCK S,SUTTER J,et al.. Characterisation of a novel super-polished bimorph mirror[J]. Journal of Physics:Conference Series,2013,425:052026.

【19】WANG H C,SAWHNEY K,BERUJON S,et al.. Fast optimization of a bimorph mirror using X-ray grating interferometry[J]. Optics Letters,2014,39(8):2518-2521.

【20】ALCOCK S G,NISTEA I,SUTTER J P,et al.. Characterization of a next-generation piezo bimorph X-ray mirror for synchrotron beamlines[J]. J. Synchrotron Radiation,2015,22:10-15.

【21】SUTTER J P,ALCOCK S G,KASHYAP Y,et al.. Creating flat-top X-ray beams by applying surface profiles of alternating curvature to deformable piezo bimorph mirrors[J]. J. Synchrotron Radiation,2016,23:1333-1347.

【22】阎瑾瑜.压电效应及其在材料方面的应用[J].数字技术与应用,2011,1:100-101.
YAN J Y. Piezoelectric effect and its application in materials[J]. Digital Technology & Application,2011,1:100-101.(in Chinese)

【23】SUTTER J P,ALCOCK S G,SAWHNEY K J S. Automated in-situ optimization of bimorph mirrors at diamond light source[C]. Proceedings of SPIE,Advances in X-Ray/Euv Optics and Components VI,2011,8139:813906.

【24】SAWHNEY K J S,ALCOCK S G,SIGNORATO R. A novel adaptive bimorph focusing mirror and wavefront corrector with sub-nanometre dynamical figure control[C]. Proceedings of SPIE,Adaptive X-ray Optics,2010,7803:780303.

引用该论文

JIN Li-min,LUO Hong-xin,WANG Jie,WANG Na-xiu,XU Zhong-min. Application of bimorph mirror in the optical system of synchrotron radiation light source[J]. Chinese Optics, 2017, 10(6): 699-707

金利民,罗红心,王 劼,王纳秀,徐中民. 双压电片镜在同步辐射光源光学系统中的应用[J]. 中国光学, 2017, 10(6): 699-707

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF