设计了一种高集成检波器, 其包含贴片天线、匹配电路、肖特基二极管和透镜.在中芯国际130 nm工艺下将天线、匹配电路、肖特基二极管集成到一个芯片上, 检波器的集成度相比于分离式有了明显的提高.为增强片上天线的方向性, 进行了带有空气腔的尼龙透镜的设计和优化.透镜上的空气腔不但提供了组装空间而且减小了透镜体积.通过测试, 天线在220 GHz辐射增益为22 dB, 其中透镜贡献约为20 dB.检波器测试得到的响应率可达到130~150 V/W,等效噪声功率计算为400~460 pW/Hz.

A high-integration detector which consists of a patch antenna, a matching circuit, schottky diodes (SBD) and lenses has been developed. The integration of detectors is increased obviously comparing with that of separated detectors by integrating antennas, matching circuits and SBD on a chip in SMIC 130 mm. To improve the directivity of the antenna on chip, the nylon lens with air cave was designed and optimized. The air cave in lens not only provides space for assembling but also reduces the size of lens. It was calculated through testing that the antenna gain at 220 GHz is 22 dB, in which the contribution of lens is about 20 dB. The tested responsivity of the detector can achieve 130-150 V/W and the noise equivalent power (NEP) is estimated to be 400~460 pW/Hz.