提出了一种新颖的基于金属脊-三角形半导体的混合表面等离子体波导结构, 基于有限元法对该波导结构进行了数值仿真和分析.主要研究了该结构的电场分布、传输长度、归一化模场面积和质量因数.结果表明:在工作波长为1550 nm时, 通过优化参数, 其有效模场面积达到0.00193 λ2, 传输长度为37.7 μm, 质量因数为4853, 该结构具有较低的损耗.与金属平板混合波导结构相比, 具有更大的质量因数, 更强的光场限制能力, 波导的综合性能更好.这种波导结构在微纳米光子学、光电子通讯和光信息存储等领域具有广阔应用前景.

A novel hybrid surface plasmon waveguide structure based on metal ridge-triangular semiconductors is proposed. The numerical simulation and analysis of the waveguide structure are carried out based on the finite element method. Also, the electric field distribution, transmission length, normalized mode field area as well as quality factor of the structure are considered here. Finally, the results show that: at the operating wavelength of 1550 nm, by optimizing the parameters, its effective mode field area is up to 0.00193 λ2, the transmission length is 37.7 μm, and the quality factor is 4853, besides, the structure has lower loss. Compared with the metal plate hybrid waveguide structure, the design of the structure has a greater quality factor and stronger light field limiting ability, what's more, the waveguide comprehensive performed better. This kind of waveguide structure has a wide application prospect in the fields of micro-nano photonics, optoelectronic communication and optical information storage.