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激光扫描红外热波成像在膜厚测量中的应用

Application of Laser Scanning Infrared Thermography for Measuring Film Thickness

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摘要

随着涂层及薄膜材料的广泛应用,工业界对膜厚的测量与质量控制提出了更高的要求,膜层厚度测试变得尤为重要。针对目前检测方法的不足,介绍了一种激光扫描红外热波测量膜厚的方法。采用“温度波线行波法”分析,使长时间激光扫描样品表面温度场函数简化。基于此,得出激光扫描样品表面的温度时间曲线可以转化为相对应的温度空间曲线与扫描速度的乘积,从而可以把样品表面的温度时间曲线转化为样品表面的温度空间曲线。通过温度空间曲线与理论公式曲线进行拟合,即可测量出膜层的厚度,最后通过自主研发的激光扫描红外热波成像设备对50~350 μm 膜层厚度进行了测量,重复性好且测量精度在5%以内。

Abstract

With the wide application of coating and thin film materials, the industry has put forward higher requirements for film thickness measurement and quality control testing. Film thickness testing is particularly important considering the shortcomings of the current detection method; therefore, we introduce a method of laser scanning infrared thermography. The long scanning of the sample surface temperature field function is simplified using the traveling-wave method on the temperature wave line. Based on this, we obtain the temperature–time curve of laser scanning the sample surface, which can be transformed into the product of temperature curve in space and the scanning velocity; this can convert the temperature–time curve of the sample surface into the temperature–space curve of the sample surface. By fitting the temperature–space curve and the theoretical formula of the space curve, we can measure the film thickness. Finally, a 50-350 μm film is measured through independent research and development of equipment, and the measurement accuracy is within 5%.

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中图分类号:TH978

所属栏目:红外应用

基金项目:科技部中小企业技术创新项目(14C26213201110)。

收稿日期:2016-11-14

修改稿日期:2017-05-25

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作者单位    点击查看

江海军:南京诺威尔光电系统有限公司,江苏 南京 210046
陈 力:南京诺威尔光电系统有限公司,江苏 南京 210046

联系人作者:江海军(hjiang@novelteq.com)

备注:江海军(1988-),男,硕士,研发工程师,主要从事红外热波无损检测研究。

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引用该论文

JIANG Haijun,CHEN Li. Application of Laser Scanning Infrared Thermography for Measuring Film Thickness[J]. Infrared Technology, 2017, 39(12): 1144-1148

江海军,陈 力. 激光扫描红外热波成像在膜厚测量中的应用[J]. 红外技术, 2017, 39(12): 1144-1148

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