激光与光电子学进展, 2018, 55 (3): 031202, 网络出版: 2018-09-10   

大口径平面镜局部采样瑞奇-康芒检验 下载: 1046次

Local Sampling Ritchey-Common Test for Large Aperture Flat Mirror
作者单位
1 中国科学院大学, 北京 100049
2 中国科学院南京天文仪器研制中心, 江苏 南京 210042
摘要
为了提升大F数下瑞奇-康芒检验的面形恢复精度,提出局部采样影响矩阵法,对干涉仪采集到的压缩椭圆图样按各像素点实际入射角大小分别建立影响矩阵,恢复像素点的面形偏差。通过该方法遍历整个平面镜镜面,得到平面镜面形。利用仿真验证了局部采样影响矩阵法的精度并和传统影响矩阵法进行详细对比,结果表明相较传统影响矩阵法,局部采样影响矩阵法在离焦、像散、三级彗差、三级像散、三级球差等因素下的精度提升十分明显,证明局部采样影响矩阵法更适合瑞奇-康芒检验的面形恢复。
Abstract
In order to improve the surface shape recovery accuracy of Ricky-Consens test under large F-number, a local sampling impact matrix method is proposed. The impact matrix is built according to the actual incident angle of each pixel point for the compressed ellipse patterns collected from an interferometer, and the surface error of the pixel point is recovered. The shape of flat mirror is obtained through this method traversing the entire mirror surface. The accuracy of local sampling impact matrix method is verified through simulation, and it is compared with the traditional impact matrix method in detail. The results show that compared with the traditional impact matrix method, the accuracy of local sampling impact matrix method is obviously improved in different aberrations of defocus, astigmatism, three levels of coma, three levels of astigmatism and three levels of spherical aberration. It is indicated that the local sampling impact matrix method is more suitable for the surface shape recovery Ritchey-Common test.

林冬冬, 胡明勇, 李金鹏, 丁耀芳. 大口径平面镜局部采样瑞奇-康芒检验[J]. 激光与光电子学进展, 2018, 55(3): 031202. Dongdong Lin, Mingyong Hu, Jinpeng Li, Yaofang Ding. Local Sampling Ritchey-Common Test for Large Aperture Flat Mirror[J]. Laser & Optoelectronics Progress, 2018, 55(3): 031202.

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